Investigation of the Structure and Properties of Nanoscale Grain-Size β-Tantalum Thin Films

Abstract

Nanoscale grain-size tantalum films with tetragonal crystalline structure were prepared on BK7 glass and 304 steel by low power direct current magnetron sputtering at room temperature. Effect of deposition time on structural and electrical properties of tantalum thin films has been investigated. In all cases, highly preferred (330) orientation can be observed in X-ray diffraction measurements. With increasing the thickness of deposited films from 152 to 388 nm, a weak X-ray photon peak is diffracted from (720) planes of β-Ta. The atomic force microscopy micrographs show the grain size of 20-30 and 100-140 nm for films deposited on glass and steel substrates respectively. Deposition rate was approximately constant. The resistivity of samples on glass substrate is decreased with increasing the time of deposition. Transmittance of deposited films on glass substrate is decreased with increasing the thickness of sample.

Effect of Low-Energy Nitrogen Ion Implantation on Friction and Wear Properties of Ion-Plated TiC Coating

“…A similar effect was observed by Singh et al, and they attributed it to the development of compressive stress on the surface of the nitride layer [26]. Another reason for this kind of shift may be due to the presence of light impurities, such as carbon and oxygen, in the sample [27]. The XRD analysis results of the implanted and un-implanted samples differed little when the dose was 2 × 10 17 ions/cm 2 .…”

Phase-field models for simulating physical vapor deposition and grain evolution of isotropic single-phase polycrystalline thin films

“…However, when the permalloy is deposited onto these surface Cu layers at the corresponding temperatures, the grain sizes in the permalloy thin film appear to slowly increase with increasing temperature until the largest grain sizes and temperatures are reached, at which point there is a rapid increase in the observed permalloy grain sizes. Furthermore, Solati et al [34] performed deposition of Ta onto both glass and steel substrates (i.e., amorphous vs. large grained) and…”