Epitaxial Fe films are grown on GaN(0001) by molecular beam epitaxy at 50 °C. Several samples of one Fe/GaN structure are subjected to rapid thermal annealing from 300 to 950 °C. Using a variety of experimental techniques, we examine the impact of this annealing step upon the morphological, structural, and magnetic properties of these samples. The results demonstrate that the material system Fe/GaN is thermally stable up to a temperature of 700 °C.