2006
DOI: 10.1007/s10582-006-0375-0
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Investigation of the time evolution of plasma parameters in a pulsed magnetron discharge

Abstract: Unbalanced DC pulse magnetron discharge with Ti target in Ar and Ar/O2 working gases was investigated by means of time resolved Lagmuir probe diagnostics. We have used in our work very low average DC discharge current up to 1 A but high instant discharge current about 10 A in the active part of pulse cycle. The experiments were carried out under higher pressures (up to 15 Pa) than usual. Temporal evolutions of internal plasma parameters such as electron density, electron temperature, plasma potential and EEPF … Show more

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Cited by 6 publications
(6 citation statements)
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“…These electrons lose energy to the background population through inelastic collisions resulting in a developing electron density on the timescale of some µs (cf figure 16) with the electrons retaining energies slightly higher than in a dc discharge. Initially, high electron temperatures in the 'on' phase were also observed in discharges with longer time scales and longer 'on' phases [36,41,43,[44][45][46][47][48].…”
Section: Bulk Electron Heatingmentioning
confidence: 99%
“…These electrons lose energy to the background population through inelastic collisions resulting in a developing electron density on the timescale of some µs (cf figure 16) with the electrons retaining energies slightly higher than in a dc discharge. Initially, high electron temperatures in the 'on' phase were also observed in discharges with longer time scales and longer 'on' phases [36,41,43,[44][45][46][47][48].…”
Section: Bulk Electron Heatingmentioning
confidence: 99%
“…A Langmuir probe is a well-established technique for plasma diagnostics that allows measurement of the local values of the plasma parameters. It has been recently used with some success to investigate different aspects of the HIPIMS plasma such as plasma density, electron temperature and electron energy distribution function (EEDF) [8][9][10]. To the best of our knowledge no work has been done to compare the plasma parameters obtained by operating HIPIMS with different target materials.…”
Section: Introductionmentioning
confidence: 99%
“…A Langmuir probe is perhaps the simplest plasma diagnostic available both in terms of theory and construction, making it a prime sensor to adapt for performing high-speed timeresolved measurements. Various attempts to perform high-speed Langmuir probe measurements by prior researchers [9,[11][12][13][14][15][16][17] have achieved limited success, often plagued by the adverse effects of stray capacitance, poor signal to noise ratios, small sample set sizes, or awkward non-physically correct windowed averaging. In this study, we have overcome these difficulties providing spatially detailed, low-noise, time-resolved plasma properties downstream from a HET.…”
mentioning
confidence: 99%