Investigation of Thermal Design Issues of a Bimaterial MEMS

Deák, E. Dávid; Plesz, Balázs; Szabó, Péter G.

doi:10.1109/therminic60375.2023.10325870

2023 29th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC) 2023

DOI: 10.1109/therminic60375.2023.10325870

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Investigation of Thermal Design Issues of a Bimaterial MEMS

E. Dávid Deák,

Balázs Plesz,

Péter G. Szabó

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Investigation of Thermal Design Issues of a Bimaterial MEMS

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References 9 publications

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