Investigation of thermal effects in through-silicon vias using scanning thermal microscopy

Wielgoszewski, Grzegorz; Jóźwiak, Grzegorz; Babij, Michał; Baraniecki, Tomasz; Geer, Robert; Gotszalk, Teodor

doi:10.1016/j.micron.2014.05.008

Cited by 7 publications

(4 citation statements)

References 18 publications

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“…The thermal probe also allows obtaining topographic information, in the conventional contact AFM mode. The calibration of the SThM system is a standardized procedure accomplished by the use of known melting points of polymers (Pollock & Hammiche, 2001; Wielgoszewski et al, 2014 a ). Semi-crystalline polymer melting standards provided with the equipment (polycaprolactone, high-density polyethylene, and polyethyleneterephthalate, with melting points ranging from 323 to 523 K) are used in the calibration (Meyers & Pastzor, n.d.).…”

Section: Methodsmentioning

confidence: 99%

“…The characterization of temperature-dependent processes and exploitation of existing and new technologies require heat transfer management. At the same time, the decreasing of characteristic feature sizes in modern devices to the order of a few tens of nanometer has turned the study of thermal physical phenomena at reduced length and time scales into an area of intense research (Dekker, 1999;Shi & Majumdar, 2004;Cretin et al, 2007;Volz, 2007;Brites et al, 2012;Tovee et al, 2012;Yue & Wang, 2012;Kar-Narayan et al, 2013;Kaźmierczak-Bałata et al, 2013;Lee et al, 2014;Wielgoszewski et al, 2014b). The need for thermal nano-characterization techniques that enable measuring and controlling temperature with nanoscale spatial resolution and high temporal resolution has led to new developments in scanning probe microscopies enabling direct observation of physical phenomena with the desired spatial and temporal resolutions.…”

Section: Introductionmentioning

confidence: 99%

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Nano-Localized Thermal Analysis and Mapping of Surface and Sub-Surface Thermal Properties Using Scanning Thermal Microscopy (SThM)

et al. 2016

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Determining and acting on thermo-physical properties at the nanoscale is essential for understanding/managing heat distribution in micro/nanostructured materials and miniaturized devices. Adequate thermal nano-characterization techniques are required to address thermal issues compromising device performance. Scanning thermal microscopy (SThM) is a probing and acting technique based on atomic force microscopy using a nano-probe designed to act as a thermometer and resistive heater, achieving high spatial resolution. Enabling direct observation and mapping of thermal properties such as thermal conductivity, SThM is becoming a powerful tool with a critical role in several fields, from material science to device thermal management. We present an overview of the different thermal probes, followed by the contribution of SThM in three currently significant research topics. First, in thermal conductivity contrast studies of graphene monolayers deposited on different substrates, SThM proves itself a reliable technique to clarify the intriguing thermal properties of graphene, which is considered an important contributor to improve the performance of downscaled devices and materials. Second, SThM's ability to perform sub-surface imaging is highlighted by thermal conductivity contrast analysis of polymeric composites. Finally, an approach to induce and study local structural transitions in ferromagnetic shape memory alloy Ni-Mn-Ga thin films using localized nano-thermal analysis is presented.

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Nano-Localized Thermal Analysis and Mapping of Surface and Sub-Surface Thermal Properties Using Scanning Thermal Microscopy (SThM)

et al. 2016

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“…SThM helps to understand the thermal phenomena at the nanoscale level by revealing physical thermal transport mechanisms with high spatial and temporal resolutions. [168] Roughly speaking, SThM is a thermally active/sensitive probe and integrated with a head of AFM to sense tip-sample force interactions using a laser-mirrorphotodetector or piezoelectric cantilever. [167,169] Many times, the optimized synthesis process also creates a few defects and morphological disorders that can be responsible for the localized hot spot formations and can act as vulnerable sites to heatinduced failure.…”

Section: Scanning Thermal Microscopymentioning

confidence: 99%

An Assessment of MXenes through Scanning Probe Microscopy

et al. 2022

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Figure 4. a) Schematic exfoliation process for Ti 3 AlC 2 showing the replacement of Al atoms by OH after reaction with HF. b) SEM images, and c) XRD patterns of Ti 3 AlC 2 powder show the compact and multi-layered structure synthesized with 30, 10, 5 wt% HF. a-c) Reproduced with permission. [28] Copyright 2011, Wiley-VCH. d) Exfoliation of multilayers MXenes into 2D nanosheets. using HF etching process. Reproduced with permission. [38]

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“…SThM and its derivatives [20,21] are essentially used for relative studies by imaging. Attempts at quantitative measurement using this technique especially for thermal conductivity are rare and delicate [22][23][24][25][26], and no uncertainty assessments have been properly made. Assessing metrological traceability also implies working with reference samples and with reference methods [17] as explained above: neither of them exists until now as no standard has been elaborated in this field.…”

Section: Introductionmentioning

confidence: 99%

Uncertainty assessment for measurements performed in the determination of thermal conductivity by scanning thermal microscopy

Ramiandrisoa

Allard

Hay

et al. 2017

Meas. Sci. Technol.

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Although its use has been restricted to relative studies, scanning thermal microscopy (SThM) is presented today as a candidate technique for performing quantitative measurement of thermal properties at the nanoscale, thanks to the development of relevant calibration protocols. Based on the principle behind near-field microscopes, SThM uses a miniaturized probe to quantify heat transfers versus samples of various thermal conductivities: since the thermal conductivity of a sample cannot be directly estimated, a direct measurand related to the heat transfer must be defined and measured for each sample. That is the reason why the SThM technique applied to thermal conductivity determination belongs to the family of inverse methods. In this work we aim to qualify the technique from a metrological point of view. For the first time, assessment of uncertainty associated with the direct measurand is performed, yielding a result of less than 2%.

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Investigation of thermal effects in through-silicon vias using scanning thermal microscopy

Cited by 7 publications

References 18 publications

Nano-Localized Thermal Analysis and Mapping of Surface and Sub-Surface Thermal Properties Using Scanning Thermal Microscopy (SThM)

Nano-Localized Thermal Analysis and Mapping of Surface and Sub-Surface Thermal Properties Using Scanning Thermal Microscopy (SThM)

An Assessment of MXenes through Scanning Probe Microscopy

Uncertainty assessment for measurements performed in the determination of thermal conductivity by scanning thermal microscopy

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