2000
DOI: 10.1016/s0304-3991(99)00181-3
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Investigation of thermoelectric silicide thin films by means of analytical transmission electron microscopy

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Cited by 5 publications
(6 citation statements)
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“…They showed that the growth of TiO 2 crystalline particles in the amorphous matrix is diffusion-limited and decreases with decreasing TiO 2 content. There also have been several reports on the formation of various nanocrystals such as Si 41 and metal silicides 33,34,42,43 in an amorphous matrix. Since these types of reactions are a diffusion-controlled process, in order to obtain a higher degree of crystallinity, longer annealing time and higher temperature are required.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…They showed that the growth of TiO 2 crystalline particles in the amorphous matrix is diffusion-limited and decreases with decreasing TiO 2 content. There also have been several reports on the formation of various nanocrystals such as Si 41 and metal silicides 33,34,42,43 in an amorphous matrix. Since these types of reactions are a diffusion-controlled process, in order to obtain a higher degree of crystallinity, longer annealing time and higher temperature are required.…”
Section: ■ Results and Discussionmentioning
confidence: 99%
“…However, in recent years, attention has been mostly paid to rhenium silicide, which is caused by several factors. First, it has been found that, of all the semiconducting silicides, rhenium silicide is best matched with silicon, the basic material of microelectronics [4,5]. Second, the manufacture and processing of rhenium silicide is rather simple [6].…”
Section: Introductionmentioning
confidence: 99%
“…Furthermore, it has been found that rhenium disilicide may exist in several stable modifications: the stoichiometric composition ReSi 2 [6,8,9], or compositions with lack of silicon: ReSi 1.8 [4,7] and ReSi 1.75 [4,5,7,10]. The probability of ReSi 1.8 [4,7] or ReSi 1.75 [7] formation is much higher than that for ReSi 2 .…”
Section: Introductionmentioning
confidence: 99%
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“…The electron microscopic investigations were carried out by using a Philips TEM CM20FEG equipped with field emission gun and post-specimen scan unit as well as a Gatan electron energy loss spectrometer PEELS 666. This allows one to acquire the energy filtered electron scattering curves, which means nearly without inelastic background for better background subtraction [3]. For the determination of the grain size distribution during annealing, the thin films on support grids were annealed in situ by using a double-tilt specimen-heating holder.…”
Section: Methodsmentioning
confidence: 99%