2019
DOI: 10.1109/jeds.2019.2936180
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Investigation of TSV Liner Interface With Multiwell Structured TSV to Suppress Noise Propagation in Mixed-Signal 3D-IC

Abstract: Mixed-signal 3D-ICs have a stacked structure of digital and analog circuit chips. In this study, the effect of noise propagation from a digital circuit on an analog circuit was evaluated using an actual mixed-signal 3D-IC. The noise propagation via through-silicon vias (TSVs) was measured, with a ring-oscillator as a noise source. For a comprehensive investigation, TSV-liner interface states were evaluated along the depth direction using unique multiwell-structured TSVs and a charge-pumping method. It was cons… Show more

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Cited by 6 publications
(3 citation statements)
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“…These results imply that the proposed memory device has the potential for implementing large-scale low-power SNN circuits. To enhance the performance of SNN circuits with non-volatile tunnel-FET memory, we consider that novel technologies such as heterojunctions [24], [25], two-dimensional materials [26], metal-nanodots flash memory [27], and three-dimensional integration [25], [28], are promising candidates. In the future, we plan to fabricate this SNN system with the non-volatile tunnel-FET memory developed in this study and other novel technologies.…”
Section: Discussionmentioning
confidence: 99%
“…These results imply that the proposed memory device has the potential for implementing large-scale low-power SNN circuits. To enhance the performance of SNN circuits with non-volatile tunnel-FET memory, we consider that novel technologies such as heterojunctions [24], [25], two-dimensional materials [26], metal-nanodots flash memory [27], and three-dimensional integration [25], [28], are promising candidates. In the future, we plan to fabricate this SNN system with the non-volatile tunnel-FET memory developed in this study and other novel technologies.…”
Section: Discussionmentioning
confidence: 99%
“…As shown in Fig. 2, the 3D-stacking technology [21,22,23,24] is a promising solution to address this issue. In our previous work [7,8], the sensing part transfers the photocurrent to the stimulator by Through-Silicon Via (TSV).…”
Section: Introductionmentioning
confidence: 99%
“…Coupling capacitance is considered to be a key factor for signal integrity optimization. Many efforts have been made to reduce the capacitance, including low-k dielectric bilayer liner 17) and thicker dielectric layer, 18) etc. Several elaborate capacitance models have been proposed 19,20) to analytically calculate the coupling capacitance with consideration of the Metal-oxide-semiconductor effects between TSVs and the substrate.…”
Section: Introductionmentioning
confidence: 99%