Investigation of wine glass mode resonance in 200-µm-diameter cenosphere-derived borosilicate hemispherical shells

Hendarto, E.; Li, Tao; Gianchandani, Yogesh B.

doi:10.1088/0960-1317/23/5/055013

Cited by 4 publications

(3 citation statements)

References 28 publications

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“…One potential application of cenospheres is inertial sensors because of the radial symmetry and properties-mechanical, electrical and optical-that are afforded by the spherical shape. The mechanical resonance of such structures has been reported recently [18].…”

Section: Introductionmentioning

confidence: 98%

Size sorting of floating spheres based on Marangoni forces in evaporating droplets

Hendarto

Gianchandani

2013

J. Micromech. Microeng.

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The high throughput size sorting of particles in liquid suspensions is of interest for a variety of microanalytical and micromanufacturing applications. Hollow glass cenospheres of various diameters ranging from 5 to 200 µm are sorted according to size by evaporation of isopropyl alcohol droplets on an unpatterned glass substrate. By raising the temperature of the glass substrate, a stable Marangoni convection is developed inside the droplet. At a substrate temperature of 55 °C, more of the larger spheres (150–200 µm) are deposited near the droplet center, but smaller spheres <50 µm are found everywhere throughout the dried region. Better sorting is observed when the temperature of the substrate is above the boiling point of the liquid. When the substrate temperature is 85 °C, higher than the boiling point of IPA, most of the spheres <50 µm are transported close to the droplet edge. In the center of the dried pattern obtained from a 0.5 µl droplet, the spheres with >150 µm diameter outnumber those with <50 µm diameter by 6×. The deposited spheres remain attached to the substrate surface when dry. The self-assembled nature of this drying pattern results in size sorting.

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Section: Introductionmentioning

confidence: 98%

Size sorting of floating spheres based on Marangoni forces in evaporating droplets

Hendarto

Gianchandani

2013

J. Micromech. Microeng.

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“…In CVGs, the resonating mass acts as the main sensing element and the geometry of it can be of different shapes. Based on the resonating mass, these types of gyroscopes can be in the form of a string [ 4 ], a single beam [ 5 , 6 ], U-shaped tuning forks (two parallel beams) [ 7 , 8 , 9 ], rocking-mass gyroscope systems (two perpendicular in-plane beams) [ 10 , 11 ], a butterfly [ 12 , 13 ], disks [ 14 , 15 , 16 , 17 , 18 , 19 ], cloverleaf-type disks [ 20 ], rings [ 21 , 22 , 23 ], rings with compliant spokes [ 24 ], non-continuous double rings (called folded-beam disks) [ 25 ], disks with special forms of supporting beams (called honeycomb disks) [ 26 ], cylinders [ 27 , 28 , 29 , 30 , 31 ], cupped cylinders [ 32 ], bell-shapes [ 33 , 34 , 35 ], 3D rectangular parallelepiped gyroscopes based on special vibratory modes of solid material (e.g., thickness-shear vibrating mode) [ 36 , 37 ], pierced shallow shells [ 38 ], shallow shells [ 39 ], microbubbles (spherical caps with a radius-over-height ratio larger than one) [ 40 ], cennospheres (hollow spheres) [ 41 ], quasi-spherical forms [ 42 ], spherical shell resonator gyroscopes [ 43 , 44 ,…”

Section: Introductionmentioning

confidence: 99%

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Ranji

Damodaran

et al. 2022

Micromachines

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Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical-shaped resonating structure is used as the main sensing element. Motivated by the success of macroscale hemispherical shape gyroscopes, many microscale hemispherical-shaped resonators have been produced due to the rapid advancement in semiconductor-based microfabrication technologies. The dynamic performance of hemispherical resonators depends on the degree of symmetry, uniformity of thickness, and surface smoothness, which, in turn, depend on the type of materials and fabrication methods. The main aim of this review paper is to summarize the materials, characterization and fabrication methods reported in the literature for the fabrication of microscale hemispherical resonator gyroscopes (µHRGs). The theory behind the development of HRGs is described and advancements in the fabrication of microscale HRGs through various semiconductor-based fabrication techniques are outlined. The integration of electrodes with the hemispherical structure for electrical transduction using other materials and fabrication methods is also presented. A comparison of different materials and methods of fabrication from the point of view of device characteristics and dynamic performance is discussed. This review can help researchers in their future research and engineers to select the materials and methods for µHRG development.

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“…The reason for the insufficient machining accuracy of MEMS hemispherical resonator gyroscopes is that the microhemisphere concave mold, a new three-dimensional (3D)-structure microhemispherical MEMS gyroscope shell chemical vapor desposition deposition matrix, has low processing accuracy. The 3D microstructure processing methods have evolved from traditional MEMS processing methods, such as dry etching [4], wet etching [5] and the focused ion beam method [6]. These are the typical methods for machining microstructures, but they are not effective for processing 3D structures.…”

Section: Introductionmentioning

confidence: 99%

Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool

Zhao

Wang

Huang

et al. 2020

J. Micromech. Microeng.

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The manufacture of inertial-grade and tactical-grade diamond micro electro mechanical systems (MEMS) hemispherical resonator gyroscopes is limited by the manufacturing accuracy of the monocrystalline silicon hemispherical concave mold, on which the gyroscope shell is formed. To solve this problem, this paper presents a new method for micro-ultrasonic machining of microhemispherical molds for resonator gyroscopes using an ultraprecise ceramic entire-ball tool (UCET). To study the wear mechanism of the UCET and the influence of tool wear on the surface integrity and form accuracy of the microhemispherical mold, a mathematical model for the tool wear of micro-ultrasonic machining of microhemispherical molds with UCET is established and verified by experiments. The micro-ultrasonic amplitude, the abrasive material and the abrasive size is found to have significant influences on the tool wear of the UCET. The wear rates of tungsten carbide and silicon nitride ceramic tools are 2.22% and 3.64%, respectively, which are far less than the wear rate of 8.03% of bearing steel. The wear condition agrees with the theoretical model. The machining experiment shows that the radius change, ΔR, is 6.47 µm of the microhemispherical mold processed by UCET, which is much better than 32 µm of the micromold processed by micro-electro discharge machining at one time. After 10 continuous machining runs, the deviation rate of the form accuracy of the micromold is 1.71%, 3.71% and 24.21%, due to the wear of tungsten carbide, silicon nitride and bearing steel, respectively. It can be seen that micro-ultrasonic machining of microhemispherical molds using UCET has the characteristics of a high initial form accuracy, low wear rate, high integrity and form accuracy. This is a potentially effective method to obtain micromolds with high accuracy and surface integrity.

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Investigation of wine glass mode resonance in 200-µm-diameter cenosphere-derived borosilicate hemispherical shells

Cited by 4 publications

References 28 publications

Size sorting of floating spheres based on Marangoni forces in evaporating droplets

Size sorting of floating spheres based on Marangoni forces in evaporating droplets

Recent Advances in MEMS-Based 3D Hemispherical Resonator Gyroscope (HRG)—A Sensor of Choice

Micro ultrasonic machining hemispherical mold for MEMS resonator gyroscope using a novel ultraprecise ceramic entire-ball tool

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