Investigation on 2D disks and stadiums micro-resonators structures based on UV210 polymer

Abstract

International audienceWe report on the design and the overall realization of micro-resonators based on the development of adequate processes on UV210 polymer. These micro-optical structures are developed by deep ultraviolet lithography allowing fabrication of nano-structured devices by mean of low cost and reproducible processes. Two families of resonant micro-structures shaped on disk and stadium with various sizes are investigated. Structural and optical imaging characterizations have been carried out to ensure their ability as resonant integrated micro-structures. At first, scanning electron microscopy (SEM) and Nomarsky microscopy studies confirm the UV-light process resolution down to 450 nm developed on UV210 polymer. Then, optical characterizations have been performed as regards intensity and spectral properties of such micro-resonators. Field intensity measurements in visible and infrared range have been realized and validate the aptitude of the micro-structures to propagate and to allow an evanescent photonic coupling between waveguides and micro-resonators. Finally, spectral analyses demonstrate the presence of optical resonances with 1.45 nm and 2.19 nm free spectral range values for respectively disk and stadium micro-structures. The UV210 polymer appears appropriate for the realization of micro-structures requiring a few hundred nanometers gap-scale while maintaining adequate spectral properties for versatile applications in telecommunication, metrology and sensors