Investigation on the Dynamic Behaviour of an Ultrasonic-Levitation Magnetic Guiding System

Abstract

Abstract. Guiding systems for precision manufacturing machines have to fulfil high demands. Low compliance and the absence of friction is required to achieve a high production accuracy. This article presents a novel active guiding system based on the combination of ultrasonic levitation and magnetic actuators. Firstly, the combined actuator and its working principles are described. Subsequently, the concept for an active, frictionless and medium-free guiding system is outlined. In addition to the free degree of freedom (DOF) in guiding direction, the other 5 DOF are adjustable in order to improve the guides positioning accuracy. The experimental validation of the concept is conducted with a simplified prototype, acting as a 3 DOF adjustable planar guide. Finally, measured compliance frequency responses demonstrate the performance of this novel active guiding concept.