“…Firstly, w-Al(Cr)N precipitates are formed at the grain boundaries (GBs), followed by the formation of h-Cr(Al)N 0.5 -phase as a consequence of nitrogen loss with a subsequent two-step decomposition of CrN into Cr 2 N and Cr 5–8 . The determination of the onset temperature of the phase decomposition ( T o,d ) over a wide Al composition range, as well as its correlation to the film microstructure and intrinsic stress, is crucial because the formation of the stable w-Al(Cr)N phase results in a reduction of hardness, wear and oxidation resistance 9–13 . In the case of AlCrN-based thin films, however, the complex interplay between temperature-dependent characteristics and properties such as the onset of phase transformation, coefficients of thermal expansion (CTEs), gradients of residual stresses, defect density, hardness, toughness and elastic modulus in different atmospheres is however not yet fully understood 5,6,8,14–16 .…”