This paper investigates the design, fabrication, testing of Ni-Cr based thin film resistors (TFRs) with 80:20 ratio is fabricated on a 2 inch GaAs wafer for monolithic microwave integrated circuits (MMICs) applications. For the purpose of assessing the Ni-Cr TFRs performance in 3D MMICs, five resistors having size of 0.5, 1, 2, 4 and 8 squares and thickness of 30 nm each from five distinctive groups were measured. All the TFRs are measured with and without polyimide on top of these resistors. The TFRs with polyimide exhibits a minor increase in resistance value which is possibly due to the oxidation process during the curing of two layers of polyimides. On the other hand, great temperature solidness has been watched over the temperature examined and a greatest TCR of 60 ppm C −1 is achieved from room temperature to 150 °C.