2008
DOI: 10.1007/s00542-008-0596-1
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Investigations of development process of high hollow beveled microneedles using a combination of ICP RIE and dicing saw

Abstract: International audienceMicromachined needles provide a promising technology for painless delivery of molecules or foreign substance into a living cell. Over the recent years, a variety of different microneedle shapes and materials have been studied and have shown their facility to disrupt stratum corneum layer to increase the skin permeability. In this paper, we described an alternative process to fabricate high and beveled hollow out-of-plane microneedles. Silicon microneedles dimensions are 40–60 lm in inner … Show more

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Cited by 20 publications
(8 citation statements)
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References 9 publications
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“…Deep anisotropic etching, isotropic etching and mask technique were used to fabricate cylindrical microneedles with a side-opening orifice [150]. In addition to chemical etching methods, a dicing saw was used together with deep reactive ion etching to obtain hollow silicon microneedles with sharp tips [151]. …”
Section: Fabrication Of Microneedlesmentioning
confidence: 99%
See 1 more Smart Citation
“…Deep anisotropic etching, isotropic etching and mask technique were used to fabricate cylindrical microneedles with a side-opening orifice [150]. In addition to chemical etching methods, a dicing saw was used together with deep reactive ion etching to obtain hollow silicon microneedles with sharp tips [151]. …”
Section: Fabrication Of Microneedlesmentioning
confidence: 99%
“…Images reproduced with permission from references (a) [148], (b) [149], (c) [145], (d) [150], (e) [151], (f) [156], (g) [168], (h) [345], (i) [163], (j) [317], and (k) [167]. …”
Section: Figurementioning
confidence: 99%
“…In order to avoid the breakage of the top part of the needles inside the skin, microneedle array with biodegradable tips have been developed [117] Encapsulation of molecules within microneedles that dissolve within the skin for bolus or sustained delivery has also been studied [118]. Hollow microneedles have also been fabricated and used to flow drug solutions into the skin [119]. …”
Section: Therapeutic Applicationsmentioning
confidence: 99%
“…Microneedles can fall into two categories: solid microneedle structures (Henry et al 1998;Wilke et al 2005) and hollow microneedle structures Baron et al 2008). Solid microneedles are either precoated with the drug or only used to create perforations in skins for subsequent local drug administration, each of these is not fit for the long-term and continuous drug delivery.…”
Section: Introductionmentioning
confidence: 99%