2018
DOI: 10.1007/s10854-018-0320-6
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Investigations on preferentially oriented Al-doped ZnO films developed using rf magnetron sputtering

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Cited by 17 publications
(2 citation statements)
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“…In the substitute group, doped ZnO is considered to be the utmost promising candidate for its low cost, non-toxicity, high optical bandgap. ZnO doped with Al, Ga, B, In, and so forth show very similar electrical and optical properties to conventional ITO. ,, Al-doped ZnO thin films (AZO), being low-cost, are extensively used in a wide range of photonic devices such as flat panel display, solar cell, LED, and so forth. Various vacuum-assisted deposition processes such as sputtering, pulsed laser deposition, electron beam evaporation, and so forth as well as non-vacuum-aided technique such as spray pyrolysis, chemical vapor deposition, sol–gel, and so forth are reported aplenty for the deposition AZO film. However, all these techniques require elevated temperature at some stage to have high quality AZO film with a higher figure of merit (FOM) value.…”
Section: Introductionmentioning
confidence: 99%
“…In the substitute group, doped ZnO is considered to be the utmost promising candidate for its low cost, non-toxicity, high optical bandgap. ZnO doped with Al, Ga, B, In, and so forth show very similar electrical and optical properties to conventional ITO. ,, Al-doped ZnO thin films (AZO), being low-cost, are extensively used in a wide range of photonic devices such as flat panel display, solar cell, LED, and so forth. Various vacuum-assisted deposition processes such as sputtering, pulsed laser deposition, electron beam evaporation, and so forth as well as non-vacuum-aided technique such as spray pyrolysis, chemical vapor deposition, sol–gel, and so forth are reported aplenty for the deposition AZO film. However, all these techniques require elevated temperature at some stage to have high quality AZO film with a higher figure of merit (FOM) value.…”
Section: Introductionmentioning
confidence: 99%
“…such as plastic deformation for grains refinement, however, it has strict requirements for the size of the samples. Second phase particles also could be introduced for grains refinement, and they have the pinning effect at grain boundaries, preventing their migration, thereby enhancing the creep resistance and strength of magnesium alloys [1][2][3][4] .…”
Section: Introductionmentioning
confidence: 99%