2014
DOI: 10.1016/j.protcy.2014.09.075
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Investigations on Strain Behaviour of Polymer Substrates During a Separation Process

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Cited by 4 publications
(2 citation statements)
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“… ( a ) Cross section of a simulated single sensor connected to the silicon grid (blue) when lifted by the tool (green); ( b ) Top view of the sensor’s deformation caused by a planar tool detected by the white light interferometer [ 59 ]. …”
Section: Current Developmentsmentioning
confidence: 99%
See 1 more Smart Citation
“… ( a ) Cross section of a simulated single sensor connected to the silicon grid (blue) when lifted by the tool (green); ( b ) Top view of the sensor’s deformation caused by a planar tool detected by the white light interferometer [ 59 ]. …”
Section: Current Developmentsmentioning
confidence: 99%
“… Evolution of a modular micro sensor ( a ) from a first generation to ( b ) second generation with larger feed cables, enlarged contact pads and a meander shaped sensing area with an increased number of turns [ 59 ]. …”
Section: Current Developmentsmentioning
confidence: 99%