2001
DOI: 10.1016/s0924-4247(01)00649-5
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Investigations on thermo-pneumatic volume actuators based on PCB technology

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Cited by 47 publications
(27 citation statements)
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“…Micro-pumps are smaller than conventional fans and consume less power. They can be divided into the following types: electromagnetic [3,4], piezoelectric [5][6][7], shape memory alloy [8], electrostatic [9], thermo-pneumatic [10], and dynamic, which are typically represented by electro-hydrodynamic [11] and magneto-hydrodynamic [12,13] pumps. Electromagnetic and piezoelectric devices are often used as actuators in commercial products.…”
Section: Introductionmentioning
confidence: 99%
“…Micro-pumps are smaller than conventional fans and consume less power. They can be divided into the following types: electromagnetic [3,4], piezoelectric [5][6][7], shape memory alloy [8], electrostatic [9], thermo-pneumatic [10], and dynamic, which are typically represented by electro-hydrodynamic [11] and magneto-hydrodynamic [12,13] pumps. Electromagnetic and piezoelectric devices are often used as actuators in commercial products.…”
Section: Introductionmentioning
confidence: 99%
“…However, the volume expansion achieved by paraffin actuators is typically limited to a few tens of percent. From a fabrication point of view, pure thermopneumatic actuators [7][8][9] where a gas's thermal expansion is used might be an attractive alternative, but they are very limited in what pressure and thus the volume change that they can produce. Hydrogel actuators, on the other hand, show large expansions capabilities and can in many cases be used for actuating liquids.…”
Section: Introductionmentioning
confidence: 99%
“…The simplest systems consist of a small cavity filled with a material, in most cases a fluid, that expands upon heating. This can be either a liquid, like water, isopropanol or special designated fluids like the Performance Fluids fabricated by 3M [1,2] or a gas, which in most cases is normal air [3,2,4,5,6,7,8,9,10,11,12]. On one side the cavity is sealed off by a membrane .…”
Section: Thermal Expansionmentioning
confidence: 99%
“…Several materials are used to form a membrane. Polymers like silicon rubber [14,1,2], parylene [2], polymide [21,3], PDMS [6,7,10,18,20], Kapton [9,8], Mylar [8] are used because of their strength and flexibility, but the silicon itself is also used as a membrane material [4,13,5,19,15,12]. In order to reduce the residual stress and generate a larger deflection a corrugated membrane can be used instead of a flat membrane [5,4,13].…”
Section: Actuator Designmentioning
confidence: 99%
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