“…Several materials are used to form a membrane. Polymers like silicon rubber [14,1,2], parylene [2], polymide [21,3], PDMS [6,7,10,18,20], Kapton [9,8], Mylar [8] are used because of their strength and flexibility, but the silicon itself is also used as a membrane material [4,13,5,19,15,12]. In order to reduce the residual stress and generate a larger deflection a corrugated membrane can be used instead of a flat membrane [5,4,13].…”