Invited Article: Progress in coherent lithography using table-top extreme ultraviolet lasers

Li, W.; Urbański, Ł.; Marconi, M. C.

doi:10.1063/1.4937899

Cited by 7 publications

(1 citation statement)

References 98 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…10,11 Imaging plates (IPs) is a technique that has been successfully used to study x-rays in very high-energy plasma physics experiments. [12][13][14] An IP consists of a photostimulable material mounted on a flexible polymer film that contains europium ions that can be excited when exposed to photons and high-energy species.…”

Section: Introductionmentioning

confidence: 99%

High-space resolution imaging plate analysis of extreme ultraviolet (EUV) light from tin laser-produced plasmas

Musgrave

Takehiro

Ugomori

et al. 2017

Review of Scientific Instruments

View full text Add to dashboard Cite

With the advent of high volume manufacturing capabilities by extreme ultraviolet lithography, constant improvements in light source design and cost-efficiency are required. Currently, light intensity and conversion efficiency (CE) measurments are obtained by charged couple devices, faraday cups etc, but also phoshpor imaging plates (IPs) (BaFBr:Eu). IPs are sensitive to light and high-energy species, which is ideal for studying extreme ultraviolet (EUV) light from laser produced plasmas (LPPs). In this work, we used IPs to observe a large angular distribution (10°-90°). We ablated a tin target by high-energy lasers (1064 nm Nd:YAG, 1010 and 1011 W/cm2) to generate the EUV light. The europium ions in the IP were trapped in a higher energy state from exposure to EUV light and high-energy species. The light intensity was angular dependent; therefore excitation of the IP depends on the angle, and so highly informative about the LPP. We obtained high-space resolution (345 μm, 0.2°) angular distribution and grazing spectrometer (5-20 nm grate) data simultaneously at different target to IP distances (103 mm and 200 mm). Two laser systems and IP types (BAS-TR and BAS-SR) were also compared. The cosine fitting values from the IP data were used to calculate the CE to be 1.6% (SD ± 0.2) at 13.5 nm 2% bandwidth. Finally, a practical assessment of IPs and a damage issue are disclosed.

show abstract