(Invited) Ion-Cut from Smart to Smarter: Ulrich Gösele's Impact on Science and Technology of Ultrathin Layer Transfer

Abstract

Ulrich Gösele made numerous contributions to the science and technology of semiconductor low dimensional systems, heterostructures and nanoscale structures. This paper will be based upon the personal experience of the author who worked directly with Ulrich Gösele on several fundamental and engineering subjects. In particular, the impact of Ulrich Gösele on the basic understanding and applications of the ion-cut process will be addressed.