Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

Yong, Yuen Kuan; Moheimani, S. O. Reza; Kenton, Brian J.; Leang, Kam K.

doi:10.1063/1.4765048

Cited by 416 publications

(217 citation statements)

References 218 publications

(361 reference statements)

Supporting

Mentioning

216

Contrasting

Order By: Relevance

“…1, but it is small relative to the magnitude of the signal. These results illustrate that the limiting element is the lateral scan rate; the use of advanced stages 14 would allow for line rates on the order of a kHz and the corresponding 50-fold or better increase in frame rate.…”

mentioning

confidence: 96%

High speed atomic force microscopy enabled by a sample profile estimator

Huang

Andersson

2013

Applied Physics Letters

View full text Add to dashboard Cite

In this paper, an estimation scheme for imaging in Atomic Force Microscopy (AFM) is presented which yields imaging rates well beyond the bandwidth of the vertical positioner and allows for high-speed AFM on a typical commercial instrument. The estimator can be applied to existing instruments with little to no hardware modification other than that needed to sample the cantilever signal. Experiments on a calibration sample as well as lambda DNA are performed to illustrate the effectiveness of this method. These show a greater than an order-of-magnitude improvement in the imaging rate. In atomic force microscopy (AFM), 1 a controller is used to tightly regulate the tip-sample interaction. Topological information is typically derived from the corresponding motion of the vertical (z) actuator. 2 As a result, the rate of taking a single measurement is limited by the bandwidth of the z-piezo loop and a high overall frame rate comes at a cost in terms of the scanning size and the resolution. 3 Advanced hardware and specialized controller designs have been developed and integrated in a variety of commercial and research AFMs 4-6 to create high-speed AFM (HS-AFM) instruments that approach video-rate imaging.Algorithmic approaches to HS-AFM seek to work with existing hardware and improve imaging rates by alternative approaches to selecting and acquiring measurements or through signal processing techniques to extract more information from poor signals. Because they require little to no hardware modification, they can be applied to existing AFMs to improve imaging rates as well as to HS-AFM instruments for even further gains. One example is our previous work for high-speed imaging of biopolymers and other string-like samples. 7 In this local raster scan, imaging time is reduced by using feedback to focus the measurements in the region of interest, namely, close to the biopolymer. Its effectiveness is due in part to the structure of the sample, and the approach is therefore limited to string-like samples. To allow for more general samples, in this work we present a fast estimation scheme that determines the sample profile at rates independent of the z-actuator loop. As a result, high-speed imaging can be achieved by integrating this signal with the conventional raster motion executed by any commercial AFM. It is also compatible with novel scanning trajectories, such as spiral scanning, 8 cycloids, 9 Lissajous figures, 10 and our local raster scan. 7 Driven by the requirements of imaging soft samples, we focus on intermittent (tapping) mode AFM.There are a few existing estimation-based approaches to AFM imaging. One relies on building an advanced controller based on robust control theory for the z-piezo. 11 By taking advantage of the structure of the controller, a signal was derived with a transfer function of 1 to the sample profile, implying an infinite bandwidth in the estimator. It is, however, only applicable to a particular instrument and relies on the specific controller. Given the fact that most commercial AFMs are equ...

show abstract

mentioning

confidence: 96%

High speed atomic force microscopy enabled by a sample profile estimator

Huang

Andersson

2013

Applied Physics Letters

View full text Add to dashboard Cite

show abstract

“…[1,2] Meanwhile, piezoelectric (PZT) actuators with nanometer resolution, excellent dynamic characteristics, small size, and high driving force have been usually employed in the nanopositioning stages. [3,4] However, the drawback of the piezoelectric actuator is its limited travel range which are not suitable for requiring a large workspace.…”

Section: Introductionmentioning

confidence: 99%

A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

2016

View full text Add to dashboard Cite

Abstract. This paper presents the design, analysis, and testing of a single-axis compliant nanopositioning stage with large stroke driven by piezoelectric actuator for micro/nano manipulation. In the developed stage, a hybrid displacement amplifier integrating two kinds of flexure-based input/output decoupling modules have been developed to achieve a large stroke and precise positioning. The analytical modelling and finite element analysis are given to validate the mechanical performance and a prototype of the proposed stage is fabricated for performance tests. The experimental results show that the developed stage has the travel stroke of 214 μm with a resolution of 8 nm. It is demonstrated that the stage can be adequate for micro/nano manipulation.

show abstract

“…15 More comprehensive review is found in the literature. 8,16 Although some of these scanners have already been used for practical studies, there is large room for further improvements especially in the usability and resolution. For example, most of the high-speed scanners require a small sample size, which has limited the applicability of high-speed AFMs.…”

Section: Introductionmentioning

confidence: 99%

Separate-type scanner and wideband high-voltage amplifier for atomic-resolution and high-speed atomic force microscopy

Miyata

Usho

Yamada

et al. 2013

Review of Scientific Instruments

View full text Add to dashboard Cite

We have developed a liquid-environment atomic force microscope with a wideband and low-noise scanning system for atomic-scale imaging of dynamic processes at solid/liquid interfaces. The developed scanning system consists of a separate-type scanner and a wideband high-voltage amplifier (HVA). By separating an XY-sample scanner from a Z-tip scanner, we have enabled to use a relatively large sample without compromising the high resonance frequency. We compared various cantileverand sample-holding mechanisms by experiments and finite element analyses for optimizing the balance between the usability and frequency response characteristics. We specifically designed the HVA to drive the developed scanners, which enabled to achieve the positioning accuracy of 5.7 and 0.53 pm in the XY and Z axes, respectively. Such an excellent noise performance allowed us to perform atomic-resolution imaging of mica and calcite in liquid. Furthermore, we demonstrate in situ and atomic-resolution imaging of the calcite crystal growth process in water. © 2013 AIP Publishing LLC. [http://dx

show abstract

Invited Review Article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

Cited by 416 publications

References 218 publications

High speed atomic force microscopy enabled by a sample profile estimator

High speed atomic force microscopy enabled by a sample profile estimator

A Piezo-Driven Compliant Nanopositioning Stage with Large Stroke for Micro/Nano Manipulation

Separate-type scanner and wideband high-voltage amplifier for atomic-resolution and high-speed atomic force microscopy

Contact Info

Product

Resources

About