Ion‐Beam‐Assisted Lift‐Off Technique for Three‐Dimensional Micromachining of Freestanding Single‐Crystal Diamond

Olivero, P.; Rubanov, S.; Reichart, P.; Gibson, Brant C.; Huntington, S.T.; Rabeau, James R.; Greentree, Andrew D.; Salzman, J.; Moore, D.; Jamieson, D. N.; Prawer, S.

doi:10.1002/adma.200500752

Cited by 176 publications

(118 citation statements)

References 18 publications

Supporting

Mentioning

115

Contrasting

Unclassified

Order By: Relevance

“…Micromachining of diamond is presently being explored for similar purposes, see [24,25], and modelling has shown that suitable cavities are in principle fabricatable [26]. The application of diamond for quantum computing and quantum optics applications has recently been reviewed [27].…”

Section: Potential Implementationsmentioning

confidence: 99%

Quantum phase transitions of light

et al. 2006

View full text Add to dashboard Cite

Recently, condensed matter and atomic experiments have reached a length-scale and temperature regime where new quantum collective phenomena emerge. Finding such physics in systems of photons, however, is problematic, as photons typically do not interact with each other and can be created or destroyed at will. Here, we introduce a physical system of photons that exhibits strongly correlated dynamics on a meso-scale. By adding photons to a two-dimensional array of coupled optical cavities each containing a single two-level atom in the photon-blockade regime, we form dressed states, or polaritons, that are both long-lived and strongly interacting. Our zero temperature results predict that this photonic system will undergo a characteristic Mott insulator (excitations localised on each site) to superfluid (excitations delocalised across the lattice) quantum phase transition. Each cavity's impressive photon out-coupling potential may lead to actual devices based on these quantum manybody effects, as well as observable, tunable quantum simulators.The Jaynes-Cummings [1] model is arguably the most important model for understanding light-matter interactions. It describes the interaction of a single, quasiresonant optical cavity field with a two-level atom. The coupling between the atom and the photons leads to optical nonlinearities and an effective photon-photon repulsion. Perhaps the most extreme demonstration of this photonic repulsion is photon blockade, demonstrated recently by Birnbaum et al. [2], where photonic repulsion prevents more than one photon from being in the cavity at any one time. Photon blockade was initially theoretically described with a four-state system [3], with multiplication of the weak Kerr nonlinearity effected by placing a large number of atoms within each cavity. However, it was quickly realised that the photonic blockade mechanism does not persist in the limit of many atoms [4], rapidly degrading as the number of atoms per cavity is increased [5]. Later Rebic et al. showed that the nonlinear interaction afforded by placing a single two-level atom inside a cavity would suffice for realising photon blockade [6]. This observation was highly significant as it allowed the full weight of the Jaynes-Cummings model to be used to attack and understand this problem.To create an atom-photon system whose dynamics mirror those traditionally associated with strongly interacting condensed matter systems, we consider a twodimensional array of photonic bandgap cavities. Each cavity contains a single two-level atom, quasi-resonant with the cavity mode. Evanescent coupling between the cavities due to their proximity allows inter-cavity photon hopping. This configuration is depicted schematically in Fig. 1(a), where we have explicitly chosen three nearest neighbours per cavity (coordination number z = 3), for reasons explained below. Because we are considering small cavities, with volumes of order λ 3 where λ is the wavelength of the light, there will be strong atom-photon couplings that will dominate over the...

show abstract

Section: Potential Implementationsmentioning

confidence: 99%

Quantum phase transitions of light

et al. 2006

View full text Add to dashboard Cite

show abstract

“…22,23 All cross section lamellas were extracted from the center of the sample, i.e., the most homogeneous area, with thicknesses around 200 nm. Diffraction contrast observations were performed with a Jeol 1200EX and a Jeol 2010F microscopes operating at 120 keV and 200 keV, respectively.…”

mentioning

confidence: 99%

Critical boron-doping levels for generation of dislocations in synthetic diamond

Alegre

Araújo

Fiori

et al. 2014

Applied Physics Letters

View full text Add to dashboard Cite

International audienceDefects induced by boron doping in diamond layers were studied by transmission electron microscopy. The existence of a critical boron doping level above which defects are generated is reported. This level is found to be dependent on the CH 4 /H 2 molar ratios and on growth directions. The critical boron concentration lied in the 6.5–17.0 10 20 at/cm 3 range in the <111> direction and at 3.2 10 21 at/cm 3 for the <001> one. Strain related effects induced by the doping are shown not to be responsible. From the location of dislocations and their Burger vectors, a model is proposed, together with their generation mechanism

show abstract

“…(ii) The 'lift-off' technique 65,70 , which consists of creating a sacrificial layer by irradiating the diamond with ions. This layer is removed after graphitizing it by annealing.…”

Section: Nanophotonics Componentsmentioning

confidence: 99%

Advances in diamond nanofabrication for ultrasensitive devices

Castelletto

Rosa

Blackledge³

et al. 2017

Microsyst Nanoeng

View full text Add to dashboard Cite

This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano-and micromechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to enhance the sensitivity in detecting mass and forces as well as magnetic field down to quantum mechanical limits and will lead pioneering innovations in ultrasensitive sensing and precision measurements in the realm of the medical sciences, quantum sciences and related technologies. INTRODUCTIONDiamond is an ideal platform for nano-and microfabrication leading to a range of robust sensors. This is due to the outstanding mechanical and wide spectral optical transparency of diamond, combined with biocompatibility and lack of toxicity in both bulk and nanostructures. Moreover, diamond can be fabricated with high purity and control using chemical vapor deposition. However, due to its hardness and cost, some of its applications in nanomechanics, optomechanics and nanophotonics reside mainly in its polycrystalline or nanocrystalline forms, which do not always retain the nuance of the outstanding properties of monocrystalline diamond.A recent review 1 describes diamond optical and mechanical properties compared to other materials currently used for optomechanical components (Si, Si 3 N 4 , SiC, and α-Al 2 O 3 ), showing that, in principle, there are more favorable properties of diamond for nanomechanical and optomechanical realizations. Therefore, a considerable effort has been taking place over the last five years to exploit these properties in a wide spectrum of diamond nanosystems. To date, single crystal diamond utilization for nanomechanical components 2 , (for example, nano electromechanical systems (NEMS) and micro electro-mechanical systems (MEMS)), as well for nanophotonics 3,4 compared to above mentioned materials, has been limited due to its growth requirements. In fact, a single crystal diamond cannot be grown on any other substrate than itself. This prevents wafer-scale processing and it represents a challenge in the application of conventional diamond nanofabrication methods. On the other hand, polycrystalline diamond films, which can be grown in high quality from 4 to 6 inches' wafers 5 , permit to fabricate optomechanical components with quality factors and oscillation frequencies rivaling single crystal diamond 6 .

show abstract

Ion‐Beam‐Assisted Lift‐Off Technique for Three‐Dimensional Micromachining of Freestanding Single‐Crystal Diamond

Cited by 176 publications

References 18 publications

Quantum phase transitions of light

Quantum phase transitions of light

Critical boron-doping levels for generation of dislocations in synthetic diamond

Advances in diamond nanofabrication for ultrasensitive devices

Contact Info

Product

Resources

About