Ion Beam Deposition and Cleaning

Rauschenbach, B.

doi:10.1007/978-3-030-97277-6_9

Cited by 1 publication

(2 citation statements)

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“…Such low energy (100 eV to a few keV) ions from an ion source can also be used for surface cleaning, polishing, erosion, and pattern. 28 The sputtering yields are also ion mass and energy dependent, where heavy ions have a higher sputtering yield under the same ion energy and the sputtering yields reach their maximum value at a few keV for light ions (e.g., H + /He + ) and around 100 keV for heavy ions (e.g., Xe + ). 29 A typical example of ion beam etching is focused ion beam manufacturing.…”

Section: Ion Beam Technologymentioning

confidence: 99%

“…From the technique point of view, the advantage of the IBD/IBAD technique is the controllability of the energies and influences of the ions incident on the growing surface. Such low energy (100 eV to a few keV) ions from an ion source can also be used for surface cleaning, polishing, erosion, and pattern . The sputtering yields are also ion mass and energy dependent, where heavy ions have a higher sputtering yield under the same ion energy and the sputtering yields reach their maximum value at a few keV for light ions (e.g., H + /He + ) and around 100 keV for heavy ions (e.g., Xe + ) …”

Section: Ion Beam Technologymentioning

confidence: 99%

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Recent Progress in the Application of Ion Beam Technology in the Modification and Fabrication of Nanostructured Energy Materials

Huang,

Wu,

Cai

et al. 2024

ACS Nano

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The development of green, renewable energy conversion and storage systems is an urgent task to address the energy crisis and environmental issues in the future. To achieve high performance, stable, and safe operation of energy conversion and storage systems, energy materials need to be modified and fabricated through rationalization. Among various modification and fabrication strategies, ion beam technology has been widely used to introduce various defects/ dopants into energy materials and fabricate various nanostructures, where the structure, composition, and property of prefabricated materials can be further accurately tailored to achieve better performance. In this paper, we review the recent progress in the application of ion beam technology in material modification and fabrication, focusing on nanostructured energy materials for energy conversion and storage including photo-(electro-) water splitting, batteries (solar cells, fuel cells, and metal-ion batteries), supercapacitors, thermoelectrics, and hydrogen storage. This review first provides a brief basic overview of ion beam technology and describes the classification and technological advantages of ion beam technology in the modification and fabrication of materials. Then, modification of energy materials by ion beams is reviewed mainly concerning doping and defect introduction. Fabrication of energy materials is also discussed mainly in terms of heterojunctions, nanoparticles, nanocavities, and other nanostructures. In particular, we emphasize the advantages of ion beam technology in improving the performance of energy materials. Finally, we point out our understanding of challenges and future perspectives in applying ion beam technology for the modification and fabrication of energy materials.

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Section: Ion Beam Technologymentioning

confidence: 99%

Section: Ion Beam Technologymentioning

confidence: 99%