2024
DOI: 10.1107/s1600577524002935
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Ion beam figuring for X-ray mirrors: history, state-of-the-art and future prospects

Riley Shurvinton,
Hongchang Wang,
Paresh Pradhan
et al.

Abstract: Synchrotron light sources require X-ray optics with extremely demanding accuracy for the surface profile, with less than 100 nrad slope errors and sub-nanometre height errors. Such errors are challenging to achieve for aspheres using traditional polishing methods. However, post-polishing error correction can be performed using techniques such as ion beam figuring (IBF) to improve optics to the desired quality. This work presents a brief overview of the history of IBF, introduces some of the challenges for obta… Show more

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