Ion Beam Induced Growth Structure of Fluorite Type Oxide Films for Biaxially Textured htsc Coated Conductors

Abstract

Biaxially aligned film growth by dual-ion-beam sputtering method were studied for fluorite type (Zr 0.85 Y 0.15 O 1.93 (YSZ), Hf 0.74 Yb 0.26 O 1.87 , CeO 2 ), pyrochlore type (Zr 2 Sm 2 O 7 ), and rare-earth C type (Y 2 O 3 , Sm 2 O 3 ) oxides on polycrystalline Ni-based alloy substrates. Cube-textured (all axes aligned with a <100> axis substrate normal) films were obtained for fluorite and pyrochlore ones by low energy (<300 eV) ion bombardment at low temperatures (< 300 o C). Besides, cube textured Y 2 O 3 films were obtained in far narrow conditions with a quite low energy (150 eV)-ion bombardment at the temperature of 300 o C. The assisting ion energy dependence was discussed in connection with lattice energies for these oxide crystals.