1989
DOI: 10.1002/sca.4950110508
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Ion beam‐sputtered and magnetron‐sputtered thin films on cytoskeletons: A high‐resolution tem study

Abstract: A comparison of ion beam‐sputtered and magnetron‐sputtered thin platinum (Pt) and tungsten (W) films was made. Cytoskeletons from detergent extracted glioma cells grown on gold grids were coated with Pt or W at thicknesses of 1, 1.5, and 2.5 nm. Transmission electron micrographs were taken at high magnification and the granularity of the metal films was evaluated both on the Formvar film and the filaments of the cytoskeleton. In order to make a comparison between the two deposition methods, the metal depositio… Show more

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Cited by 14 publications
(20 citation statements)
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“…Increasing the deposition rate increases the number of initial metal atoms that can serve as nucleation sites, thus resulting in a decreased grain size (Lewis and Anderson, 1978;Muller, 1985). We have clearly demonstrated this relationship experimentally using magnetron and ion beam sputter coating (Lindroth and Sundgren, 1989). Decreasing the target to specimen distance in a magnetron sputter coater while keeping other parameters such as vacuum conditions and current constant, increases the deposition rate while decreasing the granularity of Pt and W films.…”
Section: Metal Coating For High Resolution Emmentioning
confidence: 90%
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“…Increasing the deposition rate increases the number of initial metal atoms that can serve as nucleation sites, thus resulting in a decreased grain size (Lewis and Anderson, 1978;Muller, 1985). We have clearly demonstrated this relationship experimentally using magnetron and ion beam sputter coating (Lindroth and Sundgren, 1989). Decreasing the target to specimen distance in a magnetron sputter coater while keeping other parameters such as vacuum conditions and current constant, increases the deposition rate while decreasing the granularity of Pt and W films.…”
Section: Metal Coating For High Resolution Emmentioning
confidence: 90%
“…(Panayi et al, 1977;Echlin, 1978Echlin, ,1981Echlin and Kaye, 1979;Peters, 1980Peters, , 1986cNockolds et al, 1982;Lindroth and Sundgren, 1989). Potential contaminants include oilbackstreaming from both the rotary pump and the oil diffusion pump, hydrocarbons and water present in the Argon gas, and water from various sources (Peters, 1980Nockolds et al, 1982).…”
Section: Metal Coating For High Resolution Emmentioning
confidence: 95%
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