“…Because the mobility of deposited metal atoms is related to their melting point, to form metal films that are fine-grained one must use metals such as tungsten (W), tantalum (Ta), and niobium (Nb) which, because of their high melting points are called refractory metals. Unlike the low melting point metals such as Au, AufPd, and Pt which can be deposited by vacuum-evaporation, refractory metals have to be deposited with other methods such as electron beam evaporation (Slayter, 19801, Penning sputtering (Peters, 1980, 1985a,b, 1986a, magnetron sputtering (Nockolds et al, 1982;Bell et al, 1987aBell et al, , 1988Lindroth et al, 1987Lindroth et al, , 1988Lindroth and Sundgren, 1989) or ion beam sputtering (Jacopic et al, 1978;Geller et al, 1979;Franks et al, 1980;Clay and Peace, 1981;Evans and Franks, 1981; Kemmenoe and Bullock, 1983;Lindroth and Sundgren, 1989). The two most widely used methods for depositing refractory metals and the ones with which we have experience are magnetron and ion beam sputtering.…”