Ion energy distribution of an inductively coupled radiofrequency discharge in argon and oxygen

Hippler, R.; Kredl, Jana; Vartolomei, Vasile

doi:10.1016/j.vacuum.2008.05.011

Cited by 15 publications

(13 citation statements)

References 16 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Between these two regions, the slight density dip appears to be present around z ∼ 3 cm and to separate the upstream and downstream plasmas, which has been often observed in the experiments on the DL [14], [15]. On the other hand, the density without the PMs is found to gradually decrease along the z-axis as previously reported in some experiments on the plasma expansion into a vacuum [7], [16]- [19].…”

Section: Methodssupporting

confidence: 80%

“…5(b) also shows the accelerated group of the beam ions at V c ∼ 25 V corresponding to the upstream plasma potential in Fig. 4(b), in addition to the background ions at V c ∼ 12 V. The ion acceleration by the Boltzmann electric field has been observed in many experiments on simple ICP devices; these showed two types of the IEDF having the beam ions and the hot-tail ions [7], [8], [16]- [19]. The shape of the IEDF is relevant to the charge-exchange process, which is discussed here qualitatively because we have now no information on the spatial variation of the neutral pressure.…”

Section: Resultsmentioning

confidence: 75%

See 1 more Smart Citation

Supersonic Ion Beam Driven by Permanent-Magnets-Induced Double Layer in an Expanding Plasma

Takahashi

Shida

Fujiwara

et al. 2009

IEEE Trans. Plasma Sci.

View full text Add to dashboard Cite

Abstract-Plasma potential structures and ion-energy distribution functions are measured in a magnetically expanding radiofrequency plasma using permanent magnets (PMs) and in a geometrically expanding one, where the radio-frequency power and the argon-gas pressure are maintained at 250 W and 1 mtorr, respectively. In the magnetically expanding plasma, a rapid potential drop like a double-layer structure and a subsequent supersonic ion beam are detected by retarding field energy analyzers. On the other hand, a plasma potential structure following Boltzmann relation accelerates the ions in the geometrically expanding plasma. The comparison between the results in both cases indicates that the existence of the PMs is effective for the generation of the high-speed ion beam, where the mach number of the ion beam is increased to about 3.5 by using the PMs compared with the mach number of 2.3 in the operation mode of the geometrically expanding plasma.Index Terms-Double layer (DL), expanding plasma, ion acceleration, permanent magnets (PMs), plasma potential structures.

show abstract

Section: Methodssupporting

confidence: 80%

Section: Resultsmentioning

confidence: 75%

Supersonic Ion Beam Driven by Permanent-Magnets-Induced Double Layer in an Expanding Plasma

Takahashi

Shida

Fujiwara

et al. 2009

IEEE Trans. Plasma Sci.

View full text Add to dashboard Cite

show abstract

“…This source is described in Ref. [26]. The ion energy distribution function (IEDF) consists of two peaks, a high energy peak (hep) due to the ions in the beam attenuated through charge exchange collisions with the neutrals, and a low energy peak (lep) due to thermalized ions.…”

Section: The Plasma Sourcementioning

confidence: 99%

Long range annealing of defects in germanium by low energy plasma ions

Archilla

Coelho

Auret

et al. 2015

Physica D: Nonlinear Phenomena

View full text Add to dashboard Cite

Ions arriving at a semiconductor surface with very low energy (2 -8 eV) are interacting with defects deep inside the semiconductor. Several different defects were removed or modified in Sb-doped germanium, of which the E-center has the highest concentration. The low fluence and low energy of the plasma ions implies that the energy has to be able to travel in a localized way to be able to interact with defects up to a few microns below the semiconductor surface. After eliminating other possibilities (electric field, light, heat) we now conclude that moving intrinsic localized modes (ILMs), as a mechanism of longdistance energy transport, are the most likely cause. This would be striking evidence of the importance of ILMs in crystals and opens the way to further experiments to probe ILM properties both in semiconductors and in the metals used for contacts. Although most of the measurements have been performed on germanium, similar effects have been found in silicon.

show abstract

“…The results for the spatial distribution of electron density and potential from the center of the source towards the reactor wall are shown in figures 6 (a) and (b), respectively. In the same figures, a comparison of the data with the experimental results and the fitting of the spherical plasma expansion model [23,24] is included.…”

Section: Resultsmentioning

confidence: 99%

“…Figure 6: (a) Electron density and (b) plasma potential as a function of the distance from the center of the coil towards as calculated in the present simulation and compared to the spherical expansion model and experimental measurements of [23,24].…”

Section: Resultsmentioning

confidence: 99%