“…Its originally recorded and fitted Raman spectra with certain characteristic regions are demonstrated in Figure b,c, respectively. From Figure c, each Raman spectrum can be processed by peak deconvolution, namely, a benzene ring peak of 1227 cm –1 , a D-mode of 1360 cm –1 originating from the breathing vibration of ring-sp 2 -based configurations, and a G-mode of 1580 cm –1 resulting from the stretching vibration of aromatic or chain sp 2 -based configurations. ,− As for the peak around 1227 cm –1 , it can be believed that the intrinsic benzene ring sp 2 structure of the outmost PLC layers has the potential for its derivation, which is markedly different from the highly hydrogenated DLC monolayer films using a deposition parameter of low ion energies in previous reports. , The relevant study has noticed that the benzene ring sp 2 structures derive from the retaining of the benzene ring molecular structures of the toluene gases, which can be contained in the films for the deposition voltage at a low level of 0.3 kV. , Moreover, the G -peak location position and band intensity ratios of I D / I G can also be obtained by the Raman fitting results, as shown in Figure c. From the following deduction of the quantitative formula proposed by Casiraghi et al, the hydrogen content of the DLC films can be calculated H [ a t % ] = 21.7 + 16.6 0.25em log { m I false( G false) false[ μ normalm false] } where m is regulated as the linear slope of the Raman spectrum in the wavenumber range from 1000 to 1800 cm –1 containing the information of the two bands D-peak and G-peak, and I ( G ) is the intensity of the G-peak, which can be obtained after the peak fitting process by adopting the Gaussian deconvolution method.…”