1989
DOI: 10.1002/pssa.2211120129
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Ion Implantation Studies of Collision Cascades in Solids

Abstract: The basic mechanisms are reviewed which determine the lattice site occupation of impurities implanted into metals. The experimental results demonstrate that the implanted atoms occupy substitutional sites during the relaxation phase of the collision cascade. Their subsequent displacements are due to the interaction with point defects.

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