Surface & Interface Analysis
 2003
DOI: 10.1002/sia.1588
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Ion‐induced desorption by Ar+ ions from Al, Cu and films of Cu grown on stainless steel

M. Lozano
1
,
N. Hilleret
2
,
J.L. de Segovia
3

Abstract: The ion-induced desorption yield from pure aluminium, oxygen free high conductivity copper (OFHC) and films of copper electrodeposited on stainless steel, has been studied for unbaked samples and samples

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