Ion-induced nanopatterning of silicon: Toward a predictive model

Abstract

We review recent progress toward the development of predictive models of ion-induced pattern formation on roomtemperature silicon, with a particular emphasis on efforts to eliminate fit parameters in the linear regime by means of experimental measurements or atomistic simulations. Analytical approaches considered include "mechanistic" models of the impactinduced collision cascade, the Crater Function Framework, and continuum treatments of ion-induced stress and viscous flow. Parameter evaluation methods include molecular dynamics and binary collision approximation simulations, as well as wafer curvature measurements and grazing incidence small-angle x-ray scattering. Mathematical detail is provided in the context of key results from pattern formation theory, which are also briefly summarized.

Designing Nanostructured Ti6Al4V Bioactive Interfaces with Directed Irradiation Synthesis toward Cell Stimulation to Promote Host–Tissue-Implant Integration

“…In this context, we define surface diffusivity as an additional energetic term to the thermodynamic diffusivity where the incident energetic ions enhance mobility of surface atoms . In turn, mass redistribution consists of the ion-induced preferential mixing and consequent displacement of atoms resulting in phase separation of components in a material at the surface. , In addition, surface erosion (e.g., physical sputtering) is also critical for ion fluences (10 16 –10 19 cm –2 ) and energy regimes (e.g., 0.1–10 keV) driving nanopatterning in polycrystalline metals. As shown in Figure and Figures SI_4 and SI_5 of Supporting Information, the influence of grain orientation on nanopatterning formation is higher at normal or near normal incidence angles (0° and 30°) whereas it appears reduced at higher incidence angles (60° to 80°).…”

Interplay of viscosity and surface tension for ripple formation by laser melting

“…Introducing the ansatz (65) into the nonlinear equations (31), multiplying with e −ik l x , and integrating over x leads to coupled equations for the amplitudes. One sees that quadratic terms cannot yield quadratic structures since it leads to k i + k j − k l = 0 as condition which cannot be completed by two pairwise oppositely directed wavevectors.…”

“…Among these nanopatterning 29 especially the ripple formation has been investigated 30 . For recent overviews see [31][32][33] . Analogously we want to explore here the pattern formation of melted surfaces due to the laser-beam impact.…”

Self-Organized Tailoring of Faceted Glass Nanowrinkles for Organic Nanoelectronics

“…In view of surface functionalization over a large area, a variety of self-assembled nanofabrication methods based either on direct interparticle interaction or on driven self-assembly have recently emerged, , demonstrating a strong potential for applications of pseudoperiodic planar assemblies of nanostuctures. Alternatively, large-area arrays of nonplanar nanostructures can also be achieved by exploiting self-organization at surfaces under the destabilizing action of external driving forces, for example, induced by defocused ion beam irradiation. − Under this condition, periodic vertical patterning of the surface of different materials (either crystalline semiconductors and metals, or amorphous dielectric substrates) can be effectively induced over macroscopic areas. The nanoscale morphology can be tailored by simply acting on macroscopic parameters such as ion species, ion dose, ion incidence angle or substrate temperature.…”