Ion-induced sputtering as a light source for atomic spectroscopy

Nanoscale 3D Tomography by In-Flight Fluorescence Spectroscopy of Atoms Sputtered by a Focused Ion Beam

“…Here, we introduce a focused ion beam (FIB) analysis techniquedepicted in Figure a–dbased on in-flight fluorescence spectroscopy (FS) of atoms sputtered by energetic ions. − The FIB-FS technique has high 3D spatial resolution, high sensitivity, and the ability to detect all elements in the periodic table. Moreover, the technique is inherently compatible with FIB nanofabrication techniques, which have matured into versatile methods used broadly for direct-write processing of nanostructured materials and devices. − FIB-FS is complementary to SIMS which is, however, typically performed with highly specialized pulsed ion beam time-of-flight (TOF) analysis instruments ,− that are inappropriate for nanofabrication applications.…”

“…The FIB-FS technique is based on spectroscopy of light emitted by atoms ejected from a surface by ions. Prior studies of this phenomenon have focused on two broad topics: interpretation of emission spectra and compositional (qualitative and quantitative) analysis of surfaces. − The former are fundamental studies of electronic excitation mechanisms, efficiencies of de-excitation pathways, emission broadening processes, and emissions from sputtered molecular fragments and from the parent, ion-bombarded solid. The latter are studies of detection sensitivities and demonstrations of depth profiling.…”