Abstract:Graphene grown by chemical vapor deposition and supported on SiO 2 and sapphire substrates was studied following controlled introduction of defects induced by 35 keV carbon ion irradiation. Changes in Raman spectra following fluences ranging from 10 12 cm -2 to 10 15 cm -2 indicate that the structure of graphene evolves from a highlyordered layer, to a patchwork of disordered domains, to an essentially amorphous film.These structural changes result in a dramatic decrease in the Hall mobility by orders of magnitude while, remarkably, the Hall concentration remains almost unchanged, suggesting that the Fermi level is pinned at a hole concentration near 1x10 13 cm -2 . A model for scattering by resonant scatterers is in good agreement with mobility measurements up to an ion fluence of 1x10 14 cm -2 .(a)