___________________________________________________________________________________Ion pair formation, generically described as AB → A + + B − , from vacuum-UV photoexcitation of trifluoromethyl sulfur pentafluoride, SF 5 CF 3 , has been studied by anion mass spectrometry using synchrotron radiation in the photon energy range 10−35 eV. The anions F − , F 2 − and SF x − (x = 1−5) are observed. With the exception of SF 5 − , the anions observed show a linear dependence of signal with pressure, showing that they arise from ion pair formation. SF 5 − arises from dissociative electron attachment, following photoionization of SF 5 CF 3 as the source of low-energy electrons. Cross sections for anion production are put on to an absolute scale by calibration of the signal strengths with those of F − from both SF 6 and CF 4 .Quantum yields for anion production from SF 5 CF 3 , spanning the range 10 −7 to 10 −4 , are obtained using vacuum-UV absorption cross sections. Unlike SF 6 and CF 4 , the quantum yield for F − production from SF 5 CF 3 increases above the onset of photoionization.3