Ionized Cluster Beams: Physics and Technology

Yamada, Isao; Takaoka, Gikan H.

doi:10.1143/jjap.32.2121

Cited by 99 publications

(36 citation statements)

References 42 publications

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“…The Japanese group of Kyoto University was the first to explore the idea of depositing clusters with high kinetic energies (typically a few keV) to form thin films [51]. The basic idea of the Ionized Cluster Beam (ICB) technique is that the cluster breaks upon arrival and its kinetic energy is transferred to the adatoms which then have high lateral (i.e.…”

Section: Accelerated Clustersmentioning

confidence: 99%

“…In fact, the very presence of a significant fraction of large clusters in the beam seems dubious [55,56]. There is some experimental evidence [51] offered by Kyoto's group to support the effective presence of a significant fraction of large clusters in the beam, but the evidence is not conclusive. In short, it is difficult to make a definite judgement about the ICB technique.…”

Section: Accelerated Clustersmentioning

confidence: 99%

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Growth of nanostructures by cluster deposition: Experiments and simple models

1999

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This paper presents a comprehensive analysis of simple models useful to analyze the growth of nanostructures obtained by cluster deposition. After detailing the potential interest of nanostructures, I extensively study the first stages of growth (the submonolayer regime) by kinetic MonteCarlo simulations. These simulations are performed in a wide variety of experimental situations : complete condensation, growth with reevaporation, nucleation on defects, total or null clustercluster coalescence . . . . The main scope of the paper is to help experimentalists analyzing their data to deduce which of those processes are important and to quantify them. A software including all these simulation programs is available at no cost on request to the author. I carefully discuss experiments of growth from cluster beams and show how the mobility of the clusters on the surface can be measured : surprisingly high values are found. An important issue for future technological applications of cluster deposition is the relation between the size of the incident clusters and the size of the islands obtained on the substrate. An approximate formula which gives the ratio of the two sizes as a function of the melting temperature of the material deposited is given. Finally, I study the atomic mechanisms which can explain the diffusion of the clusters on a substrate and the result of their mutual interaction (simple juxtaposition, partial or total coalescence . . . ).

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Section: Accelerated Clustersmentioning

confidence: 99%

Section: Accelerated Clustersmentioning

confidence: 99%

Growth of nanostructures by cluster deposition: Experiments and simple models

1999

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“…These clusters reveal a new phase relative to the initial state of the materials, and the physical and chemical properties of a cluster are different from those of the bulk state [5][6][7]. Therefore, cluster studies have attracted much interest, and various kinds of cluster ions have been studied as an extension of new materials studies [8,9].…”

Section: Introductionmentioning

confidence: 99%

Nanocluster Ions and Beam Techniques for Material Modification

Takaoka

2016

Trans. Mat. Res. Soc. Japan

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Various kinds of clusters such as hydrogen, ionic, and metallic bonding clusters were generated using several unique methods such as the nozzle beam, high-electric-field, and evaporation-on-liquid methods. The size and structure of these clusters were analyzed by time-of-flight (TOF), high-energy electron diffraction (HEED), transmission electron microscopy (TEM), and small-angle X-ray scattering (SAXS). In addition, the impact of the cluster ions on a solid surface was investigated, and unique irradiation effects were found, such as the low-energy irradiation effect and the high-density irradiation effect. The kinetic energy of the cluster ion was converted to thermal energy, resulting in extremely high temperatures. Furthermore, the simultaneous use of chemical sputtering and thermal annealing processes was demonstrated with ethanol cluster ion beams. As a result, low irradiation damage and high-rate sputtering of Si surfaces was performed by the retardation potential method.

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“…One of these is that equivalently low-energy and high-current ion beams can be obtained using cluster ion beams. Another advantage is that high energy density deposition and the collective motions of cluster atoms are available [12,13]. As thousands of molecules impact the target at almost the same time, many-body interactions between the clusters and target atoms are induced during dense energy deposition.…”

Section: Introductionmentioning

confidence: 99%

Crystal Structure and Accelerated Ion-Irradiation Effect of Water Clusters

Takaoka

Ryuto

Takeuchi

et al. 2016

e-J. Surf. Sci. Nanotech.

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We obtained HEED patterns for water cluster beams, which showed the cubic structure that is characteristic of ice. The intensity of the (111), (220), and (311) diffraction peaks increased with an increase in the vapor pressure. As an extension of the water cluster studies, a methane hydrate cluster was generated by a gas bubbling method. In addition, the fundamental phenomenon of water cluster ion irradiation was studied using photoluminescence measurements. The cluster ion beam-induced luminescence was observed, and the luminescence intensity increased with an increase in the acceleration voltage. This indicated that the kinetic energy was converted to thermal energy and the cluster temperatures as well as impact area could be very high. Furthermore, polymer substrates such as poly(methyl methacrylate) (PMMA), polyethylene terephthalate (PET), and polycarbonate (PC) were also subjected to irradiation by the water cluster ion beams, and the sputtered depth increased with an increase in the acceleration voltage. In particular, the sputtering yield of the PMMA surface was 206 molecules per ion at an acceleration voltage of 9 kV. Compared to the PET and PC surfaces, extremely high sputtering yield was obtained owing to the chemical modification of the PMMA surface by water cluster ion irradiation.

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Ionized Cluster Beams: Physics and Technology

Cited by 99 publications

References 42 publications

Growth of nanostructures by cluster deposition: Experiments and simple models

Growth of nanostructures by cluster deposition: Experiments and simple models

Nanocluster Ions and Beam Techniques for Material Modification

Crystal Structure and Accelerated Ion-Irradiation Effect of Water Clusters

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