2018
DOI: 10.1016/j.apsusc.2018.06.230
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IP-Dip photoresist surfaces for photonic applications prepared by laser lithography and studied by AFM

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Cited by 14 publications
(8 citation statements)
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“…The objective of the microscope is immersed directly into the liquid photoresist. IP-Dip acts as a photosensitive material and also as an immersion medium, providing ideal focusing and a high resolution (down to approximately 200 nm) because of its refractive index matching with the focusing optics 32 . After the writing step, the sample is immersed in a bath of a developer (Propylene Glycol Monomethyl Ether Acetate, Sigma-Aldrich) and subsequently rinsed with isopropyl alcohol to remove the unpolymerized photoresist; it is then allowed to dry in air.…”
Section: Methodsmentioning
confidence: 99%
“…The objective of the microscope is immersed directly into the liquid photoresist. IP-Dip acts as a photosensitive material and also as an immersion medium, providing ideal focusing and a high resolution (down to approximately 200 nm) because of its refractive index matching with the focusing optics 32 . After the writing step, the sample is immersed in a bath of a developer (Propylene Glycol Monomethyl Ether Acetate, Sigma-Aldrich) and subsequently rinsed with isopropyl alcohol to remove the unpolymerized photoresist; it is then allowed to dry in air.…”
Section: Methodsmentioning
confidence: 99%
“…Originally starting with a few polymer‐based resists, today there is a whole range of such resists designed for different length scales, writing speeds, optical, mechanical, or surface properties. [ 15–19 ] However, DLW‐suitable photoresists are not limited to traditional polymer‐based ones, but it is also possible to structure ceramics, [ 20,21 ] metals, [ 22,23 ] hydrogels, [ 24,25 ] glass, [ 26 ] and biomaterials. [ 27–32 ]…”
Section: Introductionmentioning
confidence: 99%
“…Nowadays, TPP has already become a functional tool in plenty of areas, such as micro/nanophotonics, microelectronics, bioengineering, microfluidics and other. Nanoscribe Professional GT system, in the Dip-in-liquid lithography (DiLL) configuration, allows to create three dimensional (3D) photonic structures on different surfaces with deep submicrometer resolution [10]. 3D PhC structures are more complicated to prepare and currently lithographic techniques based on polymer are mainly used.…”
Section: Introductionmentioning
confidence: 99%