J Appl Spectrosc
 2024
DOI: 10.1007/s10812-024-01721-z
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IR-Fourier Spectroscopy of Attenuated Total Internal Reflection of Polyimide Films on Single-Crystal Silicon Wafers

V. S. Prosolovich,
D. I. Brinkevich,
E. V. Grinyuk
et al.
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