IR imaging using uncooled microcantilever detectors

Senesac, Larry R.; Corbeil, James L.; Rajic, Slobodan; Lavrik, Nickolay V.; Datskos, Panos G.

doi:10.1016/s0304-3991(03)00073-1

Cited by 61 publications

(49 citation statements)

References 16 publications

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“…Between them, the most important are bimaterial microcantilevers that mechanically respond to the absorp− tion of the radiation. These sensing structures were origi− nally invented at the Oak National Laboratory (ORNL) in the mid 1990's [11][12][13][14][15], and subsequently developed by ONRL [16][17][18][19][20], the Sarnoff Corporation [21,22], Sarcon Microsystems [23][24][25] and other for imaging [26][27][28][29][30][31][32][33] and photo spectroscopic applications [34,35].…”

Section: Thermomechanical Detector Approachmentioning

confidence: 99%

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Novel uncooled infrared detectors

Rogalski

2010

Opto-Electronics Review

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Despite successful commercialization of uncooled microbolometers suitable for imaging, the community is still searching for a platform for imagers that combine affordability, convenience of operation, and excellent performance. More recently, a new type of uncooled detectors based on expansion phenomena in micromechanical structures has been introduced. These detectors are essentially free of intrinsic electronic noise and can be combined with a number of different readout techniques including: capacitive, piezoresistive, electron tunnelling, and optical. In this paper, their design structures and performance are discussed in more detail.

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Section: Thermomechanical Detector Approachmentioning

confidence: 99%

“…In dependence on readout techniques, the novel uncooled detectors can be devoted on: [13,15,17,19,20,[26][27][28][30][31][32][33], l piezoresistive [11,12], and l electron tunnelling [8]. …”

Section: Thermomechanical Detector Approachmentioning

confidence: 99%

Novel uncooled infrared detectors

Rogalski

2010

Opto-Electronics Review

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“…Pyroelectric sensors [11], thermoelectric sensors [11,20], diode detectors [9], capacitively sensed [6] or optically sensed [13,18,19] mechanical cantilevers (MEMS), and thermal light valve sensors [21] have all been investigated. As uncooled technologies, they all rely on thermally isolated pixels that increase in temperature as they absorb the IR radiation.…”

Section: Background: Longwave Ir Technologiesmentioning

confidence: 99%

Opportunities in uncooled infrared imaging: A MEMS perspective

Jones¹,

Bolle²,

Ryf³

et al. 2009

Bell Labs Tech. J.

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The applications for IR imaging have traditionally been aggressively pursued by military and homeland security organizations and have trickled down to other organizations such as search and rescue, firefighting, and law enforcement. As technologies become cheaper, a wider consumer market starts to open up including consumer security (e.g., parking lot security), sporting goods, home security, home heating/inspection markets, and automotive safety systems. For example, LWIR imaging systems have recently been offered on high-end BMW automobiles; however, the high cost of these systems still makes them a luxury option for car buyers and not profitable for the car companies.The military continues to explore imaging systems where performance criteria are the most important factors: pixel count, sensitivity, and response time. Lower cost technologies are necessary to pursue consumer applications and would also be useful in the military arena for more widespread deployment

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“…So the authorities such as University of california in Berkley (Varesi et al 1997;Mao et al 1999;Zhao and Mao 2002), Oak ridge national laboratory (Senesac et al 2003;Grbovic et al 2008); turkey (Ferhanoglu et al 2007), Boston University (huang et al 2008;Kwon et al 2009) and Shanghai Institute of Microsysytem and Information Technology, caS (Yan et al 2009) had concentrated on the research for about 7-10 years and also shown a lot of inspiring results. During 2007During -2013, we had also presented a novel Ir-FPa and successfully developed the model prototype of the infrared camera (Dong et al 2007;Jiao et al 2007;Yan-mei et al 2011).…”

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confidence: 99%

The thermal-mechanical performance of the uncooled infrared optical-readout bi-material FPA

et al. 2014

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and other uncooled micro-mechanical detectors, which is largely due to the simple fabrication and potential for high yield and low cost. So the authorities such as University of california in Berkley (Varesi et al. 1997;Mao et al. 1999;Zhao and Mao 2002), Oak ridge national laboratory (Senesac et al. 2003;Grbovic et al. 2008); turkey (Ferhanoglu et al. 2007), Boston University (huang et al. 2008;Kwon et al. 2009) and Shanghai Institute of Microsysytem and Information Technology, caS (Yan et al. 2009) had concentrated on the research for about 7-10 years and also shown a lot of inspiring results. During 2007-2013, we had also presented a novel Ir-FPa and successfully developed the model prototype of the infrared camera (Dong et al. 2007;Jiao et al. 2007; Yan-mei et al. 2011). Which improved the absorption in the wavelength range of 8-14 μm significantly. however, there are still several difficult points to be further investigated. Such as: the mechanical uniformity of the pixels, the response sensitivity, the vibration frequency of the FPa, and the thermal dependency between the neighboring pixels. In this paper, we mainly discuss about the thermal-mechanical performance of the substrate-free optical-readout bi-material FPa. Figure 1 demonstrates the schematic diagram of the Ir imaging system based on the optical-readout bi-material cantilever FPa. The Ir radiation is collected directly to one side of the FPa, which causes the substrate-free bi-material cantilevers deform after absorbing thermal heat, and the deformation of the cantilevers drive the vertical shift of the reflector. The visible optical path is on the opposite direction of the FPa, the visible light emitted by the leD is collimated by the lens and then reflected by the shifted reflectors, then via a 4f Fourier transform system, the frequency spectrum is filtered by the optical filter on the spectrum plane. So the light fluxes passing through the filter changes Abstract This paper analyzed the thermal-mechanical performance of the optical-readout bi-material infrared focal array plane (Ir-FPa), mainly on the pixel non-uniformity phenomenon. Based on the Fraunhöfer diffraction theory, the model of the initial angle inconformity among the pixels due to the processing bias was presented, the result shows that the initial angle tolerance of pixels must be kept within 0.358° for the 49.5 × 49.5 μm 2 pixel. The intensity of the image corresponding to different reflect angles of pixels was tested using the 360° horizontal rotary micro displacement stage driven by stepped motor. and the result agrees with the theoretical calculation. Furthermore, the thermal-mechanic sensitivity S T and dynamic range of the object temperature (blackbody) was also computed, which affords new reference for the research and manufacture of the optical read-out Ir-FPa process.

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IR imaging using uncooled microcantilever detectors

Cited by 61 publications

References 16 publications

Novel uncooled infrared detectors

Novel uncooled infrared detectors

Opportunities in uncooled infrared imaging: A MEMS perspective

The thermal-mechanical performance of the uncooled infrared optical-readout bi-material FPA

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