2012
DOI: 10.1007/s00339-012-6865-y
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Irradiation induced changes in small angle grain boundaries in mosaic Cu thin films

Abstract: We studied the effect of irradiation on small angle grain boundaries in mosaic structured Cu thin films. The films showed a decrease in mosaic spread via a narrowing of the full width at half maximum in XRD rocking curves and a smaller minimum yield of RBS channeling after irradiation. These data indicate the irradiation decreased the misorientation angles between mosaic blocks separated by small angle grain boundaries. Mechanisms involving interactions between grain boundary dislocations and irradiation induc… Show more

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Cited by 7 publications
(1 citation statement)
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“…High resolution X-ray diffraction is used to investigate the crystalline quality of films and evaluate the dislocation density of interfaces4243444546. The measured full width at half maximum (FWHM) from the XRD rocking curves is obtained by rotating the sample through the Bragg angle after the angle (θ) and the detector position (2θ) are fixed at the Bragg angle of the corresponding reflection.…”
Section: Resultsmentioning
confidence: 99%
“…High resolution X-ray diffraction is used to investigate the crystalline quality of films and evaluate the dislocation density of interfaces4243444546. The measured full width at half maximum (FWHM) from the XRD rocking curves is obtained by rotating the sample through the Bragg angle after the angle (θ) and the detector position (2θ) are fixed at the Bragg angle of the corresponding reflection.…”
Section: Resultsmentioning
confidence: 99%