Is Microanalysis Possible in the Helium Ion Microscope?

Joy, David C.; Griffin, Brendan

doi:10.1017/s1431927611000596

Cited by 16 publications

(14 citation statements)

References 11 publications

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“…To date, helium ion microscopy has been primarily been used in high-contrast imaging of inorganic materials; however2324, there have been some limited instances where it has been used in imaging of biological samples. These have included imaging nanofibers in hyaluronan-based pericellular matrix25, edge detection of colon cancer cells26, visualization of articular cartilage networks27 and the ultrastructure of Lepidoptera scales28.…”

mentioning

confidence: 99%

Helium Ion Microscopy (HIM) for the imaging of biological samples at sub-nanometer resolution

Joens

Huynh

Kasuboski

et al. 2013

Sci Rep

154

141

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Scanning Electron Microscopy (SEM) has long been the standard in imaging the sub-micrometer surface ultrastructure of both hard and soft materials. In the case of biological samples, it has provided great insights into their physical architecture. However, three of the fundamental challenges in the SEM imaging of soft materials are that of limited imaging resolution at high magnification, charging caused by the insulating properties of most biological samples and the loss of subtle surface features by heavy metal coating. These challenges have recently been overcome with the development of the Helium Ion Microscope (HIM), which boasts advances in charge reduction, minimized sample damage, high surface contrast without the need for metal coating, increased depth of field, and 5 angstrom imaging resolution. We demonstrate the advantages of HIM for imaging biological surfaces as well as compare and contrast the effects of sample preparation techniques and their consequences on sub-nanometer ultrastructure.

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mentioning

confidence: 99%

Helium Ion Microscopy (HIM) for the imaging of biological samples at sub-nanometer resolution

Joens

Huynh

Kasuboski

et al. 2013

Sci Rep

154

141

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“…The HIM‐MCP detects backscattered He + ions and the backscattered efficiency (Joy & Griffin, ) is also proportional to Z 2 , which varies by about 10% over the implantation range. The backscattered yield of 30 keV He + ions in Si is about 0.012, two orders of magnitude smaller than that of a 5‐keV electron beam.…”

Section: Discussionmentioning

confidence: 99%

Comparative study of image contrast in scanning electron microscope and helium ion microscope

O’Connell

Chen

Zhang

et al. 2017

Journal of Microscopy

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Summary Images of Ga+ -implanted amorphous silicon layers in a 110 n-type silicon substrate have been collected by a range of detectors in a scanning electron microscope and a helium ion microscope. The effects of the implantation dose and imaging parameters (beam energy, dwell time, etc.) on the image contrast were investigated. We demonstrate a similar relationship for both the helium ion microscope Everhart-Thornley and scanning electron microscope Inlens detectors between the contrast of the images and the Ga + density and imaging parameters. These results also show that dynamic charging effects have a significant impact on the quantification of the helium ion microscope and scanning electron microscope contrast.

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“…In this way multiple maps may be summed, on the assumption that the region of interest is thicker than the total removed material [15]. This method is effective only when the surrounding area 6 Li map of the region within the red square in a) using HIM-SIMS; e) 7 Li map of the region within the red square in a) using HIM-SIMS.…”

Section: Isotopic Calibrationmentioning

confidence: 99%

Helium ion microscope – secondary ion mass spectrometry for geological materials

Ball

Taylor

Einsle

et al. 2020

Beilstein J. Nanotechnol.

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The helium ion microscope (HIM) is a focussed ion beam instrument with unprecedented spatial resolution for secondary electron imaging but has traditionally lacked microanalytical capabilities. With the addition of the secondary ion mass spectrometry (SIMS) attachment, the capabilities of the instrument have expanded to microanalysis of isotopes from Li up to hundreds of atomic mass units, effectively opening up the analysis of all natural and geological systems. However, the instrument has thus far been underutilised by the geosciences community, due in no small part to a lack of a thorough understanding of the quantitative capabilities of the instrument. Li represents an ideal element for an exploration of the instrument as a tool for geological samples, due to its importance for economic geology and a green economy, and the difficult nature of observing Li with traditional microanalytical techniques. Also Li represents a “best-case” scenario for isotopic measurements. Here we present details of sample preparation, instrument sensitivity, theoretical, and measured detection limits for both elemental and isotopic analysis as well as practicalities for geological sample analyses of Li alongside a discussion of potential geological use cases of the HIM–SIMS instrument.

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Is Microanalysis Possible in the Helium Ion Microscope?

Cited by 16 publications

References 11 publications

Helium Ion Microscopy (HIM) for the imaging of biological samples at sub-nanometer resolution

Helium Ion Microscopy (HIM) for the imaging of biological samples at sub-nanometer resolution

Comparative study of image contrast in scanning electron microscope and helium ion microscope

Helium ion microscope – secondary ion mass spectrometry for geological materials

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