Isotropic wet chemical etching of deep channels with optical surface quality in silicon with HNA based etching solutions

Bauhuber, Michael; Mikrievskij, Andreas; Lechner, Alfred

doi:10.1016/j.mssp.2013.05.017

Cited by 30 publications

(17 citation statements)

References 12 publications

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“…Chemical wet etching methods can be categorized into two types: anistropic and isotropic [36,37]. Both processes have different etching rates which depend on the material properties of the sample.…”

Section: Chemical Wet Etchingmentioning

confidence: 99%

“…Recently, a research group applied isotropic wet etching technique to fabricate desired texture for light guidance application [36]. HNA based etchant solution is used to produce the surface structure of 300 μm deep channel with smooth wall.…”

Section: Chemical Wet Etchingmentioning

confidence: 99%

“…Plasma etching is a mature technique specific for the 5 Image of a 300 μm deep channel which has a channel wall in optical quality [36].…”

Section: Plasma Etchingmentioning

confidence: 99%

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Selection of micro-fabrication techniques on stainless steel sheet for skin friction

et al. 2016

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This review gives a concise introduction to the state-of-art techniques used for surface texturing, e.g., wet etching, plasma etching, laser surface texturing (LST), 3D printing, etc. In order to fabricate deterministic textures with the desired geometric structures and scales, the innovative texturing technologies are developed and extended. Such texturing technology is an emerging frontier with revolutionary impact in industrial and scientific fields. With the help of the latest fabrication technologies, surface textures are scaling down and more complex deterministic patterns may be fabricated with desired functions, e.g., lotus effect (hydrophobic), gecko feet (adhesive), haptic tactile, etc. The objective of this review is to explore the surface texturing technology and its contributions to the applications.

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Section: Chemical Wet Etchingmentioning

confidence: 99%

Section: Chemical Wet Etchingmentioning

confidence: 99%

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Selection of micro-fabrication techniques on stainless steel sheet for skin friction

et al. 2016

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“…Chemical wet etching methods can be categorized into two types: anistropic and isotropic (Bauhuber et al, 2013;Mondiali et al, 2015). Both processes have different etching rates which depend on the material properties of the sample.…”

Section: Chemical Wet Etchingmentioning

confidence: 99%

“…(Lim, et al, 2005) Recently, a research group applied isotropic wet etching technique to fabricate desired texture for light guidance application (Bauhuber et al, 2013). HNA based etchant solution is used to produce the surface structure of 300 μm deep channel with smooth wall.…”

Section: Chemical Wet Etchingmentioning

confidence: 99%

Texture design for skin friction and touch perception of stainless steel surfaces

Zhang¹

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SummaryTactile perception a concept with mechanical, physiological and psychological perspective, is of particular concern to the industrial companies and research area. The hedonic attributes of tactile perception are influential to our daily life like wearing clothes, using personal care products, holding tool handles or in domestic appliances. In a more general case, the tactile perception of surfaces of domestic appliances greatly affects the quality of our daily life.Stainless steel is one of the most common materials used in automobile, architecture, kitchenware and medical applications. In order to fabricate the pre-defined deterministic surface texture on the stainless steel material, the micro-fabrication techniques are investigated and discussed. Micro-casting, Chemical Wet Etching, Plasma Etching, Laser Surface Texturing LST and 3D Printing are the major fabrication methods to produce deterministic micro-structure in micro scale detail. In this thesis, LST is chosen to be the main fabrication method for producing the surface texture due to its accuracy and ability to fabricate on stainless steel sheet material.A skin contact model was modified based on Hertzian and Westergaard model to take into account the influence of surface texture and orientation effect. This two-term friction model enables the prediction of the contact area, sliding friction between the skin and counter-surface.Furthermore, the tactile perception involved textures were designed and investigated in both perception experiments and skin friction measurements. The thesis focusses on the relationships among tactile perception, sub-micron surface roughness features and friction at light touch conditions, with the general aim to discover design principles that enhance tactile perception.For the perception experiments, a panel test was conducted and the subjective ratings from 0 to 10 were graded by each participant to describe the level of perceived roughness, perceived stickiness and perceived comfort. For the skin friction measurements, a multi-axis force/torque transducer was used to measure the dynamic friction between skin and counter-surface in vivo.The correlation of the perception experiment and friction measurement provides design tools for texture design of future product surfaces. With the presented tactile friction model, a strategy was extracted for optimizing surfaces with respect to tactility. The pivotal element is minimizing the adhesion term of friction by minimizing the contact area by designing a surface texture with minimal contact area in sliding motion. In addition, the orientation effect is another key factor for the texture design. The results of the study can be beneficial to understand the tactility related research and product developments in the future.

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Screening of spherical moulds manufactured isotropically in plasma etching conditions

Herth

Belharet

Edmond

et al. 2021

Contributions to Plasma Physics

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Micro-moulding is a critical rapid prototyping process chain used for a wide range of applications. This study demonstrates that it is possible to manufacture mould at low excitation frequency plasma (380 kHz), on a silicon substrate using fluorinated chemistry. According to the mask aperture designed and process time, the cavities profile characteristics, depending on the plasma chemistry, were analysed to predict the degree of anisotropy and the curvature. We show the possibility of creating curvature shapes with a desirable conic constant k of 1.25. In particular, we highlighted the smallest aperture sizes are more attractive for replicating optical micro-lens arrays using silicon moulds. Otherwise, the largest aperture sizes gain more attention for optoelectronics, microsystems, and microfluidics applications.

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Isotropic wet chemical etching of deep channels with optical surface quality in silicon with HNA based etching solutions

Cited by 30 publications

References 12 publications

Selection of micro-fabrication techniques on stainless steel sheet for skin friction

Selection of micro-fabrication techniques on stainless steel sheet for skin friction

Texture design for skin friction and touch perception of stainless steel surfaces

Screening of spherical moulds manufactured isotropically in plasma etching conditions

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