Issues in precision motion control and microhandling

Bleuler, Hannes; Clavel, Reymond; Breguet, J.-M.; Langen, H.H.; Pernette, Eric

doi:10.1109/robot.2000.844172

Cited by 27 publications

(13 citation statements)

References 2 publications

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“…In recent years, a trend towards microrobot-based automation of nanohandling processes has emerged [81,[108][109][110][111][112][113][114][115][116][117][118][119][120][121][122][123][124][125][126][127]. Process feedback, i.e.…”

Section: Microrobot-based Nanohandlingmentioning

confidence: 99%

Nanohandling automation: Trends and current developments

Fatikow

Eichhorn

2008

Proceedings of the Institution of Mechanical Engineers, Part C:

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Automated robot-based nanomanipulation is one of the key challenges in microsystem technology and nanotechnology, which has recently been addressed by a rising number of R&D groups and companies all over the world. Controlled, reproducible assembly processes at the nanoscale will enable high-throughput manufacturing of revolutionary products and open up new application fields. The ultimate goal of these research activities is the development of automated nanomanipulation processes to build a bridge between existing precise handling strategies for micro and nanoscale objects and aspired high-throughput fabrication of microsystems and nanosystems. Despite the growing interest in automated nanomanipulation, there is hardly any publication that treats this research in a coherent and comprehensive way. This paper is an attempt to provide the researcher with an overview of the most important trends and developments in this rapidly expanding technology. It also informs the practising engineer and the engineering student about automation at the nanoscale level as well as about the promising fields of application. The latter can be of a very different nature as nanohandling is strongly interdisciplinary in character. This paper offers a deeper insight into nanohandling aspects of carbon nanotubes.

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Section: Microrobot-based Nanohandlingmentioning

confidence: 99%

Nanohandling automation: Trends and current developments

Fatikow

Eichhorn

2008

Proceedings of the Institution of Mechanical Engineers, Part C:

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“…The miniaturization of products coupled with development of new technologies [1,2] has enabled us to develop equipment and instruments of small dimensions [3,4]. Our aim is to create fully automated desktop microfactory.…”

Section: Introductionmentioning

confidence: 99%

Neural classifier for micro work piece recognition

Toledo¹,

Kussul²,

Baidyk³

2006

Image and Vision Computing

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“…As a rule super precise components are too expensive for use in microequipment (for example, an interferometer may cost some thousands of dollars) [23]. Less expensive devices such as precise linear encoders may cost 100-200 dollars but it is also expensive for microequipnient.…”

Section: The Main Problems Of Microfactory Creationmentioning

confidence: 99%

“…These errors, in the case of MMT, are associated with: the squareness between all the axes; the straightness of each axis; tlie rotation of axes; and the non linear behavior of the lead screw. Tlie decomposition of the errors in each axis is shown in the follow equations: 6, = fi (x) + y cos a,), + I cos a, , a,, = f Z ( y ) +~c o~a , , x + z c o s~~,~, (23) 6: = f 3 ( z ) + x c o s a Z , .…”

Section: The Second Micromachine Tool Prototype Characterizationmentioning

confidence: 99%

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Development of low-cost microequipment

Kussul

Baidyk

Ruiz

et al.

Proceedings of 2002 International Symposium on Micromechatronics and Human Science

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At present many areas of industry have strong tendencies towards miniaturization of products. Mechanical components of these products as a rule are manufactured using conventional largescale equipment or micromechanical equipment based on microelectronic technology (MEMS). The first method has some drawbacks because the conventional large-scale equipment is energy-, space-and material-consuming. The second method seems to be more advanced but has some limitations, for example, 2-or 2.5 dimensional shapes of components and materials compatible with silicon technology. In this article alternative technology of micromechanical device production is considered. This technology is based on micromachine tools and microassembly devices. The micromachine tools and microassembly devices could be produced as sequential generations of microequipment. This paper describes the efforts and some results of first generation microequipment prototyping. A micromachining center having overall sizes 130 x 160 x 85 mm was produced and characterized. This center permits us to manufacture micromechanical details having the sizes from 50 pm to 5 mm. These details have complex 3D-shape (for example, screw, gear, graduated shaft, conic details, etc.), and are made from different materials, for example, brass, steel, different plastics etc. We started to investigate and make prototypes of the assembly microdevices controlled by a computer vision system. En example of proposed technology applications (microfilters) is also described in this paper.

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Issues in precision motion control and microhandling

Abstract: This contribution illustrates with various practical examples an activity at the intersection of MEMS, System Control, Robotics and Ultraprecision Design. The resulting new application domains include Microrobotics, Microfactories and Nanotechnologies.

Cited by 27 publications

References 2 publications

Nanohandling automation: Trends and current developments

Nanohandling automation: Trends and current developments

Neural classifier for micro work piece recognition

Development of low-cost microequipment

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