Iterative subtraction of backscattering spectra in determining the depth profile of arsenic implanted in niobium films

Wang, Dachun; Xianren, Meng

doi:10.1016/0168-583x(86)90299-5

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“…Other programs utilizing similar direct approaches have also been reported 32,33 . Zhang et al 34 studied the deconvolution of RBS spectra for binary mixtures using Fourier transform techniques.…”

Section: Class B)mentioning

confidence: 98%

Status of ion beam data analysis and simulation software

Raühala

Barradas

Fazinić

et al. 2006

Nuclear Instruments and Methods in Physics Research Section B:

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The status of ion beam data analysis codes dedicated to Rutherford backscattering, elastic recoil detection analysis, and non-resonant nuclear reaction analysis, is reviewed. The most important methods and approaches employed are discussed. The stopping power and scattering cross section databases used, the ion-target interaction physics, the experimental and detection system characteristics, and the structure of samples all have a strong impact on the analytical results. The models and algorithms used by different codes are reviewed and discussed in detail. Limitations in existing codes and perspectives for further developments are presented. The importance of ascertaining the correctness and accuracy of different methods and codes used in ion beam data analysis is stressed.

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Section: Class B)mentioning

confidence: 98%