Journey of a molecule from the solid to the gas phase and vice versa: direct estimation of vapor pressure of alkaline-earth metalorganic precursors for atmospheric pressure vapor phase deposition of fluoride films

Abstract

Atmospheric pressure (AP) vapor phase processes such as spatial atomic layer deposition (S-ALD) and AP-metalorganic chemical vapor deposition (AP-MOCVD) are becoming increasingly important for their use in a variety of...

Metalorganic Chemical Vapor Deposition Approach to the Synthesis of Perovskite BaCeO3 and BaCe0.8Y0.2O3 Thin Films

“…An MOCVD approach has been successfully applied to the fabrication of BaCeO 3 and Y-doped BaCeO 3 thin films on MgO (100), and yttria-stabilized zirconia (YSZ) (100) substrates, starting from the Ba(hfa) 2 tetraglyme, Ce(hfa) 3 diglyme and Y(hfa) 3 diglyme complexes. The suitability as MOCVD precursors of the above-mentioned adducts, previously synthesized in our group [31][32][33], has been assessed through their application to the fabrication of various materials: (i) the Ce(hfa) 3 diglyme has been applied to the growth of binary CeO 2 thin films [34]; (ii) the Ba(hfa) 2 tetraglyme has been used to fabricate the piezoelectric Ba and Ti co-doped BiFeO 3 textured films [35]; and (iii) the Y(hfa) 3 diglyme has been applied for the fabrication of the YAlO 3 films [36].…”

“…The synthesis was carried out following the same procedures reported in [31], with the only difference being using dichloromethane instead of toluene. [Ba(OH) 2 •8H 2 O] was first suspended in dichloromethane, and the tetraglyme was added to the suspension.…”

Drug release control and anti-inflammatory effect of biodegradable polymer surface modified by gas phase chemical functional reaction

“…Plasma technology is an optimal method for surface modification that can be applied quickly and easily with fewer external physical and chemical influences than chemical methods or laser irradiation [19,20]. In this study, material surface modification was carried out through the gas-phase plasma process at atmospheric pressure, which has been used in various fields for a long time, and its safety and effectiveness have been verified [21][22][23].…”

Highly stable CsPbBr3 perovskite phases from new lead β-diketonate glyme adducts

“…It has been demonstrated that glymes, through oxygen-ion complexation, are very important for the stabilization of alkaline, 61,63,64 alkaline-earth 65,66 and rare-earth 67 metals. The presence of such a class of multidentate ligands, in fact, permits also to fine-tune the properties of the final metal adducts in terms of thermal stability, moisture- and air-sensitivity, solubility, and volatility.…”

“…[57][58][59][60][61] Lead β-diketonates are used as precursors in vapor phase processes, such as the case of Pb(tmhd) 2 [(H-tmhd = 2,2,6,6-tetramethyl-3,5-heptanedione)], Pb(acac) 2 , [(H-acac = 2,4-pentanedione)], and their derivatives. 56,62 It has been demonstrated that glymes, through oxygen-ion complexation, are very important for the stabilization of alkaline, 61,63,64 alkaline-earth 65,66 and rare-earth 67 metals. The presence of such a class of multidentate ligands, in fact, permits also to fine-tune the properties of the final metal adducts in terms of thermal stability, moisture-and air-sensitivity, solubility, and volatility.…”