2001
DOI: 10.1016/s0927-0248(00)00170-7
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Kelvin probe measurements of microcrystalline silicon on a nanometer scale using SFM

Abstract: Abstract:Work function measurements on cross sectioned microcrystalline pin silicon solar cells deposited by Hot−Wire CVD are presented. The experiment is realized by combining a modified Kelvin probe experiment and a scanning force microscope. The measured surface potential revealed that the built−in electric drift field is weak in the middle of the compensated intrinsic layer. A graded donor distribution and a constant boron compensation have to be assumed within the intrinsic layer in order to obtain coinci… Show more

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Cited by 11 publications
(4 citation statements)
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“…In the field of solar cells, KPFM is often used to determine the potential distribution in the cross section solar cell samples . The technique was applied to determine potential profile in a wide variety of solar cells: CIGS , crystalline silicon , microcrystalline silicon , organic bulk heterojunction and III‐V compound cells . KPFM and surface photovoltage techniques have been also used for the investigation of grain boundaries in multicrystalline silicon materials .…”
Section: Measurement Techniquesmentioning
confidence: 99%
“…In the field of solar cells, KPFM is often used to determine the potential distribution in the cross section solar cell samples . The technique was applied to determine potential profile in a wide variety of solar cells: CIGS , crystalline silicon , microcrystalline silicon , organic bulk heterojunction and III‐V compound cells . KPFM and surface photovoltage techniques have been also used for the investigation of grain boundaries in multicrystalline silicon materials .…”
Section: Measurement Techniquesmentioning
confidence: 99%
“…Although there are several studies which evaluated various types of solar cells, few reports attempted to visualize the dopant distribution in a-Si solar cell. [4][5][6][7] This is probably because the a-Si layer is so thin that such measurements are difficult. Therefore, an evaluation technique with a high spatial resolution is needed to precisely evaluate the a-Si layer.…”
Section: Introductionmentioning
confidence: 99%
“…High-resolution (<50 nm) surface topography imaging and contact potential difference (CPD) measurement were simultaneously demonstrated where CPD = 1 -2 with 1 and 2 the work functions respectively of the probe tip and the material under investigation. SKPM 3 Author to whom any correspondence should be addressed. has since been used to investigate a variety of PV and non-PV materials including single crystal Si [2], microcrystalline Si [3], GaN [4], CuGaSe 2 [5] and p-CdTe [6].…”
Section: Introductionmentioning
confidence: 99%
“…SKPM 3 Author to whom any correspondence should be addressed. has since been used to investigate a variety of PV and non-PV materials including single crystal Si [2], microcrystalline Si [3], GaN [4], CuGaSe 2 [5] and p-CdTe [6].…”
Section: Introductionmentioning
confidence: 99%