Key Technology of Electrochemical Micromachining with Laser masking

Abstract

Abstract. In order to fabricate the micro patterns cavities with micro size on 304 stainless steel, electrochemical micromachining (EMM) with laser masking based on surface modification by fiber laser masking was studied, and a device of laser-assisted EMM with the special pulse power supply was developed to achieve micro machining, which possessed the complete control system. Laser marking on the surface of 304 stainless steel can first be realized by fiber laser scanning and heating. During laser marking, metal oxide layer with pre-designed pattern can be formed by laser marking, and phase transformation can also occur at the laser scanning area on 304 stainless steel surface, which forms the laser masking layer with good corrosion resistance. The stainless steel surface with laser masking layer is subsequently etched by EMM, the laser masking layer severs as the temporary protective layer without relying on lithography mask. Accordingly, micro pattern cavities can fast be fabricated. Through machining experiments, the typical samples 23μm deep were fabricated under the optimized parameters.