2014
DOI: 10.1016/j.vacuum.2014.04.006
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Kinetic modeling of a tapered Holweck pump

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Cited by 16 publications
(13 citation statements)
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“…The understanding of the gas behavior in this regime is a key element in the above developments, and we consider the present contribution as a step towards such analysis. Considering other applications, relatively high-speed shear flows at rarefied conditions prevail in vacuum pump machines, such as the Holweck pump, where flow Mach numbers as high as ≈0.5, and Knudsen numbers reaching ≈0.5, are reported [28][29][30]. Several works [21,31] have mentioned the relevance of the nonlinear Couette problem for the analysis of microelectromechanical systems operating at high (≈100 GHz) frequencies and oscillation amplitudes of several nanometers.…”
Section: Introductionmentioning
confidence: 99%
“…The understanding of the gas behavior in this regime is a key element in the above developments, and we consider the present contribution as a step towards such analysis. Considering other applications, relatively high-speed shear flows at rarefied conditions prevail in vacuum pump machines, such as the Holweck pump, where flow Mach numbers as high as ≈0.5, and Knudsen numbers reaching ≈0.5, are reported [28][29][30]. Several works [21,31] have mentioned the relevance of the nonlinear Couette problem for the analysis of microelectromechanical systems operating at high (≈100 GHz) frequencies and oscillation amplitudes of several nanometers.…”
Section: Introductionmentioning
confidence: 99%
“…The steady isothermal gas flow through long capillaries still remains an active research topic and a subject of many investigations [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17]. Recently, simple closed-form expressions for the reduced flow rate in long tubes in all flow regimes were deduced in [18] and [19] based on direct simulation Monte Carlo (DSMC) and kinetic simulations, respectively.…”
mentioning
confidence: 99%
“…Motivated by the overwhelming complexity of channels networks contained in microfluidic chips (Thorsen, Maerkl & Quake 2002), the study of heat and mass transfer phenomena in non-straight channel geometries has become the focus of several works. In the context of rarefied gas flows, these have included, among others, studies on the effects of channels bending (Sharipov & Graur 2012;Liu et al 2018), gradual section expansion (Naris, Tantos & Valougeorgis 2014;Graur et al 2015;Hemadri, Parade & Bhandarkar 2016;Tatsios et al 2017) and geometrical irregularities, including sudden expansion and contraction (Agrawal, Djenidi & Antonia 2005;Gat, Frankel & Weihs 2008;Hong, Zhen & Yang 2008;Varade, Agrawal & Paradeep 2014).…”
Section: A22-2mentioning
confidence: 99%