Decomposition mechanism of HFC-134a, and CF 4 in water plasmas at atmospheric pressure has been investigated. The decomposition efficiency of 99.9% can be obtained up to 3.17 mol kWh -1 of the ratio of hydrofluorocarbon (HFC) feed rate to the arc power and 1.89 mol kWh -1 of the ratio of perfluorocarbon (PFC) feed rate to the arc power. The species such as H 2 , CO, CO 2 , CH 4 , and CF 4 were detected from the effluent gas of both PFC and HFC decomposition. However, CH 2 F 2 and CHF 3 were observed only in the case of HFC decomposition. The HFC and PFC decomposition generate CH 2 F, CHF x (x:1-2) , and CF y (y:1-3) radicals, then those radicals were subsequently oxidized by oxygen, leading to CO and CO 2 generation in the excess oxygen condition. However, when there is insufficient oxygen available, those radicals were easily recombined with fluorine to form by-product such as CH 2 F 2 , CHF 3 , and CF 4 .