Kinetic theory of the plasma sheath transition in a weakly ionized plasma

Abstract

The boundary layer of a weakly ionized rare gas discharge is treated using kinetic theory. A self-consistent two-scale analysis is performed and the exact presheath and sheath solutions are constructed for the following model: A plasma consisting of Boltzmann distributed electrons and singly charged atomic ions is in contact with a negative absorbing wall. The ion kinetics is dominated by charge exchange with cold neutrals (T0≪T−). The mean-free-path λ is constant and large compared with the electron Debye length λD. This model represents a collision-dominated counterpart to the well known Tonks–Langmuir model of the collision-free plasma.

Basic Problems in Edge Plasma Modelling

“…Ecker and Kanne 171, Riemann [8] and Behnel (141 included charge exchange collisions with a neutral background. Using a particle model Gierszewski et al [15] made detailed calculations on ionization, charge exchange and dissociation of neutrals ahead of the target plate.…”

A Fluid Model of the Sheath Formation in Front of an Electron Emitting Electrode with Space Charge Limited Emission Immersed in a Plasma that Contains a One‐Dimensional Mono‐Energetic Electron Beam

“…In the above mentioned approach, λ D d L, collisions of ions in the pre-sheath region can not be excluded a-priori. But taking into account various types of collisions immediately makes the model rather complicated (see e. g. [29,30]). In order to keep the model as simple as possible, ion collisions are included in our model through only one single independent parameter.…”

Theoretical overview of the large area plasma processing system (LAPPS)

“…(26)(27)(28)(29)(30) in detail. There, we define dimensionless parameters, by scaling the density to Here rio is the density as specified by balancing the ionization source against recombination.…”