Kinetics driving thin-film deposition in dielectric barrier discharges using a direct liquid injector operated in a pulsed regime

Cacot, Laura; Carnide, Guillaume; Kahn, Myrtil L.; Clergereaux, Richard; Naudé, Nicolas; Stafford, L.

doi:10.1088/1361-6463/ac94de

Cited by 9 publications

(41 citation statements)

References 51 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…As illustrated in Figure 1, the setup used in this work consists of a plane‐to‐plane DBD and a two‐stage pulsed DLI device (Atokit from Kemstream™) for the introduction of HMDSO aerosol with nitrogen carrier gas. [ 43 ] The apparatus for DBD ignition and charge‐current‐voltage diagnostics were described in previous publications. [ 13,50,51 ] The power injected in the DBD is calculated based on the measured charge and voltage values, with Lissajous figure.…”

Section: Experimental Setup and Diagnosticsmentioning

confidence: 99%

“…The mixture is then injected as pulses (10 ms opening time and 0.1 Hz injection frequency) into the gas pipe and diffuser connecting the DLI to the DBD chamber. Over the range of experimental conditions investigated, the HMDSO aerosols injected into the DBD cell consists in a fog of micrometer size droplets [ 43 ] and the liquid injection rate is 2.7 µL per pulse, that is, 16.0 µL. min −1 .…”

Section: Experimental Setup and Diagnosticsmentioning

confidence: 99%

“…[ 43,46 ] Finally, it was found that pulsed, aerosol‐assisted plasma deposition is limited by the amount of energy provided to precursor droplets and not by precursor insufficiency. [ 16,43,47–49 ]…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Soft polymerization of hexamethyldisiloxane by coupling pulsed direct‐liquid injections with dielectric barrier discharge

Cacot

Carnide

Kahn

et al. 2022

Plasma Processes & Polymers

Self Cite

View full text Add to dashboard Cite

This work examines the combination of pulsed direct-liquid injections with dielectric barrier discharge at atmospheric pressure for the deposition of organosilicon coatings using hexamethyldisiloxane (HMDSO) as the precursor and nitrogen as the carrier gas. In such conditions, deposition relies on the charging of micrometer droplets and their transport toward the substrate by the Coulomb force. The thin-film morphology and extent of precursor fragmentation are strongly linked to the amount of energy provided by the filamentary discharge to HMDSO droplets. While cross-linked and smooth coatings were achieved at low energies as in standard gas phase plasma polymers, viscous and droplet-like structured thin films were deposited at higher energies. The latter material is attributed to the soft polymerization of HMDSO droplets related to plasma-droplet interactions.

show abstract

Section: Experimental Setup and Diagnosticsmentioning

confidence: 99%

Section: Experimental Setup and Diagnosticsmentioning

confidence: 99%

See 1 more Smart Citation

Soft polymerization of hexamethyldisiloxane by coupling pulsed direct‐liquid injections with dielectric barrier discharge

Cacot

Carnide

Kahn

et al. 2022

Plasma Processes & Polymers

Self Cite

View full text Add to dashboard Cite

show abstract

“…On the other hand, Direct Liquid Injection (DLI) is a technology for feeding atomic layer deposition (ALD), chemical vapor deposition (CVD), and plasma enhanced‐chemical vapor deposition (PE‐CVD) [ 29 , 30 , 31 ] with chemical precursors. DLI enables the spraying of NP‐charged suspensions in the form of liquid droplets in dry processes.…”

Section: Introductionmentioning

confidence: 99%

Secured Nanosynthesis–Deposition Aerosol Process for Composite Thin Films Incorporating Highly Dispersed Nanoparticles

et al. 2022

Self Cite

View full text Add to dashboard Cite

Application of nanocomposites in daily life requires not only small nanoparticles (NPs) well dispersed in a matrix, but also a manufacturing process that is mindful of the operator and the environment. Avoiding any exposure to NPs is one such way, and direct liquid reaction-injection (DLRI) aims to fulfill this need. DLRI is based on the controlled in situ synthesis of NPs from the decomposition of suitable organometallic precursors in conditions that are compatible with a pulsed injection mode of an aerosol into a downstream process. Coupled with low-pressure plasma, DLRI produces nanocomposite with homogeneously well-dispersed small nanoparticles that in the particular case of ZnO-DLC nanocomposite exhibit unique properties. DLRI favorably compares with the direct liquid injection of ex situ formed NPs. The exothermic hydrolysis reaction of the organometallic precursor at the droplet-gas interface leads to the injection of small and highly dispersed NPs and, consequently, the deposition of fine and controlled distribution in the nanocomposite. The scope of DLRI nanosynthesis has been extended to several metal oxides such as zinc, tin, tungsten, and copper to generalize the concept. Hence, DLRI is an attractive method to synthesize, inject, and deposit nanoparticles and meets the prevention and atom economy requirements of green chemistry.

show abstract

“…It consists of the pulsed injection of gases, liquids, aerosols, or sprays. This can be done by gas puffing or supersonic flows [1,2], by gas or liquid valves, by ink-jet printer heads [3][4][5] or by direct liquid injection [6][7][8]. Pulsed gas injection enables to control the discharge physics.…”

Section: Introductionmentioning

confidence: 99%

Time-Resolved Analysis of the Electron Temperature in RF Magnetron Discharges with a Pulsed Gas Injection

Sadek

Vinchon

Durocher‐Jean

et al. 2022

Atoms

Self Cite

View full text Add to dashboard Cite

Pulsed gas injection in a plasma can affect many fundamentals, including electron heating and losses. The case of an asymmetric RF magnetron plasma with a pulsed argon injection is analyzed by optical emission spectroscopy of argon 2p-to-1s transitions coupled with collisional-radiative modeling. For a fully detailed population model of argon 2p levels accounting for direct and stepwise electron-impact excitation in optically thick conditions, a rapid decrease in the electron temperature, Te, is observed during each gas injection with the sudden pressure rise. The opposite trend, with unrealistic Te values before and after each pulse, is observed for analysis based on simple corona models, thus emphasizing the importance of stepwise excitation processes and radiation trapping. Time-resolved electron temperature variations are directly linked to the operating parameters of the pulsed gas injection, in particular the injection frequency. Based on the complete set of data, it is shown that the instantaneous electron temperature monotonously decreases with increasing pressure, with values consistent with those expected for plasmas in which charged species are produced by electron-impact ionization of ground state argon atoms and lost by diffusion and recombination on plasma reactor walls.

show abstract

Kinetics driving thin-film deposition in dielectric barrier discharges using a direct liquid injector operated in a pulsed regime

Cited by 9 publications

References 51 publications

Soft polymerization of hexamethyldisiloxane by coupling pulsed direct‐liquid injections with dielectric barrier discharge

Soft polymerization of hexamethyldisiloxane by coupling pulsed direct‐liquid injections with dielectric barrier discharge

Secured Nanosynthesis–Deposition Aerosol Process for Composite Thin Films Incorporating Highly Dispersed Nanoparticles

Time-Resolved Analysis of the Electron Temperature in RF Magnetron Discharges with a Pulsed Gas Injection

Contact Info

Product

Resources

About