2004
DOI: 10.1134/1.1736923
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Kinetics of an RF low-pressure discharge with a condensed phase

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“…The formation of the EEDF in a plasma with solid particles is considered in the problems of dusty plasma [5][6][7][8][9][10], while often dust particles of a given size are introduced into the plasma to study their effect on the plasma parameters. Note that in our case, dust particles are formed in the plasma volume as a result of chemical processes, and they have a size distribution that depends on the plasma parameters and, in particular, on the relative concentration of argon added to the plasma (the ratio of concentrations of n-heptane and argon) [1,4].…”
Section: The Energy Distribution Function Of Electrons In a Plasma Of...mentioning
confidence: 99%
“…The formation of the EEDF in a plasma with solid particles is considered in the problems of dusty plasma [5][6][7][8][9][10], while often dust particles of a given size are introduced into the plasma to study their effect on the plasma parameters. Note that in our case, dust particles are formed in the plasma volume as a result of chemical processes, and they have a size distribution that depends on the plasma parameters and, in particular, on the relative concentration of argon added to the plasma (the ratio of concentrations of n-heptane and argon) [1,4].…”
Section: The Energy Distribution Function Of Electrons In a Plasma Of...mentioning
confidence: 99%