Kinetics of gold-induced layer exchange crystallization of amorphous silicon suboxide films: Experimental and theoretical study

Zamchiy, A. O.; Vorobyov, Yu. V.; Lunev, N. A.; Konstantinov, V. O.; Sakhapov, S.Z.; Максимовский, Е. А.; Баранов, Е. А.

doi:10.1016/j.jallcom.2023.168818

Cited by 4 publications

(1 citation statement)

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“…At present, the hyperdoping of Si ( Figure 1 ) could be achieved by ion implantation and laser processing [ 4 , 5 ], enabling the management of impurity concentration and distribution. The main impurities are nanoparticles of Er, Ag, Fe, Ti, Ni, Zn [ 1 ], while hyperdoping by gold (Au) nanoparticles [ 6 , 7 , 8 ] is less understood exhibiting high impurity mobility in a Si matrix [ 9 ]. In the system, Au-Si bonding in the Si matrix is considerably weakened, supporting the diffusion of Si atoms through a gold overlayer and room-temperature elemental mixing in a solid solution [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

Au-Hyperdoped Si Nanolayer: Laser Processing Techniques and Corresponding Material Properties

et al. 2023

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The absorption of light in the near-infrared region of the electromagnetic spectrum by Au-hyperdoped Si has been observed. While silicon photodetectors in this range are currently being produced, their efficiency is low. Here, using the nanosecond and picosecond laser hyperdoping of thin amorphous Si films, their compositional (energy-dispersion X-ray spectroscopy), chemical (X-ray photoelectron spectroscopy), structural (Raman spectroscopy) and IR spectroscopic characterization, we comparatively demonstrated a few promising regimes of laser-based silicon hyperdoping with gold. Our results indicate that the optimal efficiency of impurity-hyperdoped Si materials has yet to be achieved, and we discuss these opportunities in light of our results.

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